{"id":3421,"date":"2025-07-09T23:02:56","date_gmt":"2025-07-09T15:02:56","guid":{"rendered":"https:\/\/taichungbro.com\/?p=3421"},"modified":"2025-07-09T23:06:59","modified_gmt":"2025-07-09T15:06:59","slug":"nanoimprint-lithography","status":"publish","type":"post","link":"https:\/\/www.taichungbro.com\/en\/2025\/07\/09\/nanoimprint-lithography\/","title":{"rendered":"\u5948\u7c73\u58d3\u5370\uff08Nanoimprint Lithography, NIL\uff09\u6703\u53d6\u4ee3\u5149\u523b\u55ce\uff1f"},"content":{"rendered":"<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<div class=\"wp-block-rank-math-toc-block\" id=\"rank-math-toc\"><h2>Table of Content<\/h2><nav><ul><li class=\"\"><a href=\"#\u5948\u7c73\u58d3\u5370\u6280\u8853\u539f\u7406\u8207\u88fd\u7a0b\u6d41\u7a0b\">\u5948\u7c73\u58d3\u5370\u6280\u8853\u539f\u7406\u8207\u88fd\u7a0b\u6d41\u7a0b<\/a><\/li><li class=\"\"><a href=\"#nil-\u8207\u5149\u523b\u7684\u89e3\u6790\u5ea6\u3001\u6210\u672c\u8207\u826f\u7387\u6bd4\u8f03\">NIL \u8207\u5149\u523b\u7684\u89e3\u6790\u5ea6\u3001\u6210\u672c\u8207\u826f\u7387\u6bd4\u8f03<\/a><\/li><li class=\"\"><a href=\"#\u6a21\u5177\u58fd\u547d\u8207\u7f3a\u9677\u63a7\u5236\">\u6a21\u5177\u58fd\u547d\u8207\u7f3a\u9677\u63a7\u5236<\/a><\/li><li class=\"\"><a href=\"#\u6700\u65b0\u7814\u7a76\u8207\u91cf\u7522\u9032\u5c55\">\u6700\u65b0\u7814\u7a76\u8207\u91cf\u7522\u9032\u5c55<\/a><\/li><li class=\"\"><a href=\"#\u6df7\u5408\u88fd\u7a0b\u8207\u300c\u53d6\u4ee3\u300d\u689d\u4ef6\">\u6df7\u5408\u88fd\u7a0b\u8207\u300c\u53d6\u4ee3\u300d\u689d\u4ef6<\/a><\/li><\/ul><\/nav><\/div>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<p>\u7576\u6df1\u7d2b\u5916\u5149\u523b\uff08DUV\uff09\u8207\u6975\u7d2b\u5916\u5149\u523b\uff08EUV\uff09\u5728 2 nm \u7bc0\u9ede\u9762\u81e8\u5149\u5b78\u7e5e\u5c04\u6975\u9650\u8207\u6578\u5104\u5143\u7f8e\u5143\u8a2d\u5099\u6210\u672c\u7684\u96d9\u91cd\u6311\u6230\u6642\uff0c\u5948\u7c73\u58d3\u5370\uff08NIL\uff09 \u4ee5\u300c\u76f4\u63a5\u58d3\u6a21\u8f49\u5beb\u300d\u8df3\u904e\u5149\u5b78\u66dd\u5149\u8207\u591a\u91cd\u758a\u5f71\uff0c\u91cd\u65b0\u7372\u5f97\u7522\u696d\u76ee\u5149\u3002\u65e5\u672c Canon \u65bc 2024 \u5e74\u63a8\u51fa FPA-1200NZ2C\uff0c\u8072\u7a31\u50c5\u9700 EUV 10 % \u7684\u80fd\u6e90\u4fbf\u80fd\u58d3\u5370 14 nm \u7dda\u5bec\uff0c\u751a\u81f3\u8207\u53f0\u7a4d\u96fb\u5408\u4f5c\u9a57\u8b49 2 nm \u7bc0\u9ede\u53ef\u80fd\u6027\uff0c\u9707\u64bc\u5149\u523b\u7248\u5716\u3002\u53e6\u4e00\u65b9\u9762\uff0cEVG\u3001Nanoscribe \u8207 Fujifilm \u7b49\u4f9b\u61c9\u93c8\u4ea6\u5728\u58d3\u5370\u8a2d\u5099\u3001\u81ea\u812b\u6a21\u6a39\u8102\u8207\u6efe\u7b52\u5f0f\u9023\u7e8c\u88fd\u7a0b\u4e0a\u52a0\u901f\u5e03\u5c40 \u3002\u7136\u800c\uff0c\u6a21\u5177\u58fd\u547d\u3001\u7f3a\u9677\u7387\u8207\u5c0d\u4f4d\u7cbe\u5ea6\u4f9d\u820a\u662f NIL \u8d70\u5411\u9ad8\u826f\u7387\u91cf\u7522\u7684\u9580\u6abb\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u5948\u7c73\u58d3\u5370\u6280\u8853\u539f\u7406\u8207\u88fd\u7a0b\u6d41\u7a0b\">\u5948\u7c73\u58d3\u5370\u6280\u8853\u539f\u7406\u8207\u88fd\u7a0b\u6d41\u7a0b<\/h2>\n\n\n\n<p>NIL \u7684\u6838\u5fc3\u662f\u5c07\u542b\u6709\u5948\u7c73\u7d50\u69cb\u7684\u525b\u6027\u77f3\u82f1\u6216\u8edf\u6027 PDMS\u6a21\u5177\uff0c\u5728\u771f\u7a7a\u6216\u5e38\u58d3\u689d\u4ef6\u4e0b\u58d3\u5165\u5857\u4f48\u65bc\u6676\u5713\u8868\u9762\u7684\u53ef\u56fa\u5316\u6a39\u8102\uff08UV \u6216\u71b1\u5851\u578b\uff09\uff0c\u518d\u900f\u904e\u7d2b\u5916\u5149\/\u52a0\u71b1\u56fa\u5316\u4e26\u812b\u6a21\uff0c\u5373\u53ef\u4e00\u6b21\u6027\u8f49\u5beb\u6578\u5341\u5948\u7c73\u5716\u5f62\u3002\u4f9d\u9a45\u52d5\u65b9\u5f0f\u5340\u5206\uff0c\u5e38\u898b\u6709\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u71b1\u58d3\u58d3\u5370\uff08T-NIL\uff09<\/strong>\uff1a\u52a0\u71b1\u81f3\u73bb\u7483\u8f49\u79fb\u6eab\u5ea6\u4ee5\u4e0a\uff0c\u58d3\u5165\u5f8c\u51b7\u537b\u3002<\/li>\n\n\n\n<li><strong>\u7d2b\u5916\u58d3\u5370\uff08UV-NIL\uff09<\/strong>\uff1a\u5e38\u6eab\u4e0b\u52a0\u58d3\uff0c\u900f\u904e\u77f3\u82f1\u6a21\u5177\u7167\u5c04 UV \u5149\u56fa\u5316\u3002<\/li>\n\n\n\n<li><strong>\u6efe\u7b52\u5f0f\u9023\u7e8c\u58d3\u5370\uff08R2R NIL\uff09<\/strong>\uff1a\u5c07\u6a21\u5177\u5305\u8986\u65bc\u6efe\u8f2a\uff0c\u53ef\u9023\u7e8c\u8655\u7406\u67d4\u6027\u57fa\u677f\uff0c\u9069\u5408\u5149\u5b78\u819c\u6216\u5fae\u900f\u93e1\u5927\u91cf\u751f\u7522\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u7531\u65bc NIL \u4e0d\u53d7\u6ce2\u9577\u9650\u5236\uff0c\u7406\u8ad6\u89e3\u6790\u5ea6\u50c5\u53d7\u6a21\u5177\u96d5\u523b\u80fd\u529b\u8207\u6a39\u8102\u5206\u5b50\u5c3a\u5bf8\u5f71\u97ff\uff1b\u7814\u7a76\u5df2\u793a\u7bc4 5 nm \u7dda\u5bec\u5716\u6848\uff0c\u9060\u4f4e\u65bc 13.5 nm EUV \u6ce2\u9577\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"nil-\u8207\u5149\u523b\u7684\u89e3\u6790\u5ea6\u3001\u6210\u672c\u8207\u826f\u7387\u6bd4\u8f03\">NIL \u8207\u5149\u523b\u7684\u89e3\u6790\u5ea6\u3001\u6210\u672c\u8207\u826f\u7387\u6bd4\u8f03<\/h2>\n\n\n\n<figure class=\"wp-block-table aligncenter\"><table class=\"has-fixed-layout\"><thead><tr><th class=\"has-text-align-center\" data-align=\"center\">\u6307\u6a19<\/th><th>EUV \u5149\u523b\uff08ASML NXE:3800E \u70ba\u4f8b\uff09<\/th><th>Nanoimprint\uff08Canon FPA-1200NZ2C*\uff09<\/th><th>\u5de5\u7a0b\u542b\u610f<\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-center\" data-align=\"center\">\u91cf\u6e2c\u7dda\u5bec<br>(\u55ae\u6b21\u52a0\u5de5)<\/td><td>13 nm \u91cf\u7522\u53ef\u884c\u30018 nm \u591a\u5716\u6848\u5316<\/td><td>14 nm \u55ae\u58d3\u5370\uff1b\u5be6\u9a57\u9054 10 nm<\/td><td>\u89e3\u6790\u5ea6\u63a5\u8fd1\uff0cNIL \u4ecd\u9700\u591a\u5716\u6848\u5316\u624d\u80fd\u6311\u6230 5 nm \u4ee5\u4e0b<\/td><\/tr><tr><td class=\"has-text-align-center\" data-align=\"center\">\u6bcf\u5c0f\u6642\u7522\u80fdWPH<\/td><td>160\u2013180 \u7247<\/td><td>20\u201340 \u7247\uff08\u76ee\u6a19 60 \u7247\uff09<\/td><td>\u5f71\u97ff\u55ae\u7247\u6210\u672c\u8207\u8a2d\u5099\u6c70\u63db\u7387<\/td><\/tr><tr><td class=\"has-text-align-center\" data-align=\"center\">\u8a2d\u5099 CAPEX<\/td><td>\u2248 2.0 \u5104\u7f8e\u5143<\/td><td>\u2248 6,000\u20137,000 \u842c\u7f8e\u5143<\/td><td>\u524d\u671f\u6295\u8cc7\u58d3\u529b\u986f\u8457\u964d\u4f4e<\/td><\/tr><tr><td class=\"has-text-align-center\" data-align=\"center\">\u55ae\u7247\u80fd\u8017<\/td><td>1 MW \u7d1a\uff08\u542b\u5149\u6e90\uff09<\/td><td>100 kW \u7d1a\uff08\u7d04 10 %\uff09<\/td><td>\u964d\u4f4e\u5ee0\u623f\u96fb\u529b\u8207\u6563\u71b1\u7b56\u5283<\/td><\/tr><tr><td class=\"has-text-align-center\" data-align=\"center\">\u7f3a\u9677\u5bc6\u5ea6<br>(\u59cb\u91cf\u7522)<\/td><td>&lt; 0.05 defects\/cm\u00b2<\/td><td>0.1\u20130.3 defects\/cm\u00b2<\/td><td>NIL \u9700\u514b\u670d\u6b98\u7559\u5c64\u3001\u6c23\u6ce1\u3001\u9846\u7c92\u6c61\u67d3<\/td><\/tr><\/tbody><\/table><figcaption class=\"wp-element-caption\">* Canon \u516c\u5e03\u4e4b\u540d\u7fa9\u898f\u683c\uff1b\u5be6\u969b\u7522\u80fd\u8207\u7f3a\u9677\u5bc6\u5ea6\u4f9d\u6a21\u5177\u8207\u6a39\u8102\u689d\u4ef6\u800c\u7570\u3002<\/figcaption><\/figure>\n\n\n\n<p>\u53ef\u4ee5\u770b\u51fa NIL \u96d6\u5728\u89e3\u6790\u5ea6\u8207\u80fd\u6548\u5177\u512a\u52e2\uff0c\u4f46\u7522\u80fd\u8207\u7f3a\u9677\u7387\u4ecd\u662f\u5de6\u53f3\u91cf\u7522\u6210\u672c\u7684\u95dc\u9375\u3002\u82e5\u7121\u6cd5\u5c07 WPH \u63d0\u5347\u81f3 80 \u7247\u4ee5\u4e0a\u4e26\u5c07\u7f3a\u9677\u5bc6\u5ea6\u58d3\u4f4e\u81f3 0.05 \u4ee5\u4e0b\uff0c\u5148\u9032\u908f\u8f2f\u6676\u7247\u5927\u898f\u6a21\u5c0e\u5165\u4ecd\u53d7\u9650\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u6a21\u5177\u58fd\u547d\u8207\u7f3a\u9677\u63a7\u5236\">\u6a21\u5177\u58fd\u547d\u8207\u7f3a\u9677\u63a7\u5236<\/h2>\n\n\n\n<p>\u6a21\u5177\u58fd\u547d\u53d6\u6c7a\u65bc\u77f3\u82f1\u786c\u5ea6\u3001\u8868\u9762\u6c1f\u5316\u934d\u5c64\u8207\u812b\u6a21\u5291\u9078\u64c7\u3002\u696d\u754c\u76ee\u6a19\u70ba\u55ae\u6a21 &gt; 10,000 \u6b21\u58d3\u5370\uff1b\u7576\u524d\u91cf\u7522\u58fd\u547d\u7d04 3,000\u20135,000 \u6b21\u3002\u7f3a\u9677\u6e90\u5247\u5305\u542b\uff1a<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u6c23\u6ce1\u6b98\u7559<\/strong>\uff1a\u6676\u5713\u8868\u9762\u5fae\u7c92\u9020\u6210\u6a39\u8102\u586b\u5145\u4e0d\u5b8c\u5168\uff0c\u53ef\u900f\u904e\u771f\u7a7a\u58d3\u5370\u8207\u4f4e\u9ecf\u5ea6\u6a39\u8102\u964d\u4f4e\u3002<\/li>\n\n\n\n<li><strong>\u6b98\u7559\u5c64\u539a\u5ea6\u4e0d\u5747<\/strong>\uff1a\u5f71\u97ff\u5f8c\u7e8c\u8755\u523b\u81e8\u754c\u5c3a\u5bf8\u3002\u512a\u5316\u65cb\u5857\u539a\u5ea6\u8207\u6a21\u5177\u6392\u6c23\u69fd\u8a2d\u8a08\u53ef\u6539\u5584\u3002<\/li>\n\n\n\n<li><strong>\u5c0d\u4f4d\u8aa4\u5dee<\/strong>\uff1a\u73fe\u884c\u96d9\u6a21\u758a\u5370\u7cbe\u5ea6\u5df2\u9054 \u00b1 3 nm\uff0c\u4f46\u9ad8\u968e SRAM \u4ecd\u9700 \u00b1 1 nm \u4ee5\u5167\u3002\u5347\u7d1a\u6fc0\u5149\u5e72\u6d89\u8207\u908a\u7de3 AI \u5075\u6e2c\u5c0d\u4f4d\u7cfb\u7d71\u662f\u89e3\u65b9\u3002<\/li>\n<\/ol>\n\n\n\n<p>Fujifilm \u5728 2025 SPIE \u6703\u8b70\u767c\u8868\u7684<strong>\u81ea\u812b\u6a21 nanoimprint resist<\/strong>\uff0c\u900f\u904e\u4ea4\u806f\u5f8c\u7522\u751f\u4f4e\u8868\u9762\u80fd\u5c64\uff0c\u5927\u5e45\u964d\u4f4e\u62d4\u6a21\u529b\u4e26\u6e1b\u5c11\u6a21\u5177\u78e8\u640d\uff0c\u88ab\u8996\u70ba\u5ef6\u9577\u58fd\u547d\u95dc\u9375\u4e4b\u4e00\u3002<br><sub>*\u4f86\u6e90 : <a href=\"https:\/\/www.fujifilm.com\/us\/en\/news\/semiconductor-materials\/fujifilm-to-present-latest-advanced-lithography-research-at-spie-advanced-lithography-patterning-2025-conference?utm_source=chatgpt.com\" target=\"_blank\" rel=\"noreferrer noopener\">fujifilm.com<\/a><\/sub><\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u6700\u65b0\u7814\u7a76\u8207\u91cf\u7522\u9032\u5c55\">\u6700\u65b0\u7814\u7a76\u8207\u91cf\u7522\u9032\u5c55<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>2 nm \u7bc0\u9ede\u8a66\u7522<\/strong>\uff1a2024 Q3 Canon \u5411\u53f0\u7063 IC \u88fd\u9020\u5546\u4ea4\u4ed8\u9996\u53f0 FPA-1200NZ2C\uff0c\u8072\u7a31\u53ef\u900f\u904e\u6df7\u5408\u96d9\u5716\u6848\u5be6\u73fe 2 nm \u9598\u6975\u7dda\u5bec\u9a57\u8b49\uff0c\u4e26\u5c0e\u5165\u5148\u9032\u5c01\u88dd\u7dda\u4ee5\u5206\u6524\u98a8\u96aa\u3002<br><sub>*\u4f86\u6e90 : <a href=\"https:\/\/www.trendforce.com\/news\/2024\/09\/30\/news-canon-delivers-nanoimprint-lithography-system-to-tie-reportedly-capable-of-producing-2nm-chips\/?utm_source=chatgpt.com\" target=\"_blank\" rel=\"noreferrer noopener\">trendforce.com<\/a><\/sub><\/li>\n\n\n\n<li><strong>\u5148\u9032\u5c01\u88dd &amp; 3D IC<\/strong>\uff1aEVG \u63a8\u51fa 300 mm UV-NIL \u8207\u6676\u5713\u9375\u5408\u6574\u5408\u5e73\u53f0\uff0c\u4e3b\u653b\u6676\u7247\u5c01\u88dd\u4e2d\u518d\u914d\u7dda\u5c64\uff08RDL\uff09\u8207\u5fae\u51f8\u584a\u9663\u5217\u3002<br><sub>*\u4f86\u6e90 : <a href=\"https:\/\/www.evgroup.com\/company\/news\/detail\/ev-group-advances-300-mm-mems-manufacturing-with-next-generation-geminir-automated-production-wafer-bonding-system?utm_source=chatgpt.com\" target=\"_blank\" rel=\"noreferrer noopener\">evgroup.com<\/a><\/sub><\/li>\n\n\n\n<li><strong>\u986f\u793a\u8207 AR \u5149\u5b78<\/strong>\uff1aNIL \u5df2\u91cf\u7522 OLED \u5fae\u900f\u93e1\u9663\u5217\u3001AR \u6ce2\u5c0e\u5149\u67f5\u8207\u8eca\u8f09 HUD\uff0c\u89e3\u6790\u5ea6\u9700\u6c42\u70ba 300\u2013600 nm\uff0c\u5c6c NIL \u7684\u300c\u751c\u871c\u9ede\u300d\u3002<\/li>\n\n\n\n<li><strong>\u5149\u4f0f\u8207\u529f\u7387\u5143\u4ef6<\/strong>\uff1a\u5229\u7528\u58d3\u5370\u5feb\u901f\u8907\u88fd\u9ed1\u77fd\u7d50\u69cb\u8207\u5fae\u6e9d\u69fd\uff0c\u53ef\u63d0\u5347\u5149\u5438\u6536\u7387 3\u20135 %\uff0c\u964d\u4f4e\u88fd\u7a0b\u6b65\u9a5f\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u9019\u4e9b\u6848\u4f8b\u986f\u793a NIL \u5728\u5148\u9032\u5c01\u88dd\u3001\u5149\u5b78\u5143\u4ef6\u7387\u5148\u9032\u5165\u91cf\u7522\uff0c\u4e26\u5411\u908f\u8f2f\u6676\u7247\u7bc0\u9ede\u8a66\u884c\u300c\u6df7\u5408\u5f0f\u300d\u88fd\u7a0b\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u6df7\u5408\u88fd\u7a0b\u8207\u300c\u53d6\u4ee3\u300d\u689d\u4ef6\">\u6df7\u5408\u88fd\u7a0b\u8207\u300c\u53d6\u4ee3\u300d\u689d\u4ef6<\/h2>\n\n\n\n<p>\u8981\u771f\u6b63\u300c\u53d6\u4ee3\u300dEUV\uff0cNIL \u5c1a\u9700\u7a81\u7834\u4e09\u9053\u95dc\u5361\uff1a<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u7522\u80fd\u7a81\u7834<\/strong>\uff1a\u696d\u754c\u4f30\u7b97\u7576 WPH \u2265 100 \u6642\uff0cNIL \u5168\u9762\u91cf\u7522\u908f\u8f2f IC \u624d\u5177\u7d93\u6fdf\u6027\uff1b\u6efe\u7b52\u5f0f\u591a\u5de5\u4f4d\u58d3\u5370\u8207\u540c\u6b65\u56fa\u5316\u88ab\u8996\u70ba\u53ef\u80fd\u89e3\u65b9\u3002<\/li>\n\n\n\n<li><strong>\u6a21\u5177\u5feb\u63db\u8207\u81ea\u4fee\u5fa9<\/strong>\uff1a\u5f15\u5165\u6a5f\u5668\u8996\u89ba AI \u5075\u6e2c\u6a21\u5177\u78e8\u640d\uff0c\u4e26\u4ee5\u7b49\u96e2\u5b50\u4fee\u5fa9\u6216 DLC \u91cd\u65b0\u934d\u819c\uff0c\u53ef\u671b\u5c07\u55ae\u6a21\u58fd\u547d\u63a8\u81f3 2 \u842c\u6b21\u4ee5\u4e0a\u3002<\/li>\n\n\n\n<li><strong>\u8a2d\u8a08\u898f\u5247\u6f14\u9032<\/strong>\uff1aEUV \u4f9d\u8cf4 OPC \u8207\u591a\u91cd\u66dd\u5149\u4ee5\u5f4c\u88dc\u81e8\u754c\u5c3a\u5bf8\u504f\u5dee\uff1bNIL \u82e5\u7d50\u5408 CAD-to-mold \u81ea\u52d5\u751f\u6210\u8207\u81ea\u9069\u61c9\u5f48\u6027\u6a21\uff0c\u8a2d\u8a08\u898f\u5247\u53ef\u540c\u6b65\u7c21\u5316\u3002<\/li>\n<\/ol>\n\n\n\n<p>\u56e0\u6b64\uff0c\u66f4\u53ef\u884c\u7684\u4e2d\u671f\u8def\u5f91\u662f<strong>EUV + NIL \u96d9\u5716\u6848\u5316<\/strong>\u2500\u2500\u4ee5 EUV \u6253\u5e95\u5c64\u95dc\u9375\u7d50\u69cb\uff0c\u518d\u7528 NIL \u5f62\u6210\u9ad8\u5bc6\u5ea6\u91d1\u5c6c\u67f5\u6216 Via \u9663\u5217\uff0c\u517c\u9867\u89e3\u6790\u5ea6\u8207\u6210\u672c\u3002<\/p>\n\n\n\n<p>\u5948\u7c73\u58d3\u5370\u4ee5\u4f4e\u6210\u672c\u3001\u4f4e\u80fd\u8017\u3001\u9ad8\u89e3\u6790\u5ea6\u7684\u512a\u52e2\uff0c\u6210\u529f\u5728\u986f\u793a\u5149\u5b78\u8207\u5148\u9032\u5c01\u88dd\u6253\u958b\u91cf\u7522\u5927\u9580\uff0cCanon\u3001EVG \u7b49\u9818\u5c0e\u5ee0\u5546\u7684\u8a66\u7522\u6848\u4f8b\u4e5f\u8b49\u660e NIL \u6709\u6f5b\u529b\u5728 2 nm \u7bc0\u9ede\u8207 EUV\u300c\u4e26\u99d5\u9f4a\u9a45\u300d\u3002\u7136\u800c\u8981\u5168\u9762\u53d6\u4ee3\u5149\u523b\uff0c\u4ecd\u9808\u5728\u7522\u80fd\u3001\u7f3a\u9677\u5bc6\u5ea6\u3001\u6a21\u5177\u58fd\u547d\u8207\u5c0d\u4f4d\u7cbe\u5ea6\u56db\u5927\u6307\u6a19\u4e0a\u9054\u5230 EUV \u540c\u7d1a\u6c34\u6e96\u3002\u9810\u671f\u672a\u4f86\u4e94\u5e74\u5167\uff0cNIL \u5c07\u66f4\u591a\u4ee5\u300c\u6df7\u5408\u5f0f\u300d\u89d2\u8272\u5207\u5165\u5148\u9032\u88fd\u7a0b\uff0c\u5728\u6210\u672c\u654f\u611f\u3001\u5716\u5f62\u91cd\u8907\u6027\u9ad8\u6216\u5c0d\u5149\u5b78\u9650\u5236\u654f\u611f\u7684\u5c64\u7d1a\u8207 EUV \u5206\u5de5\u5408\u4f5c\u3002\u5c0d\u8a2d\u8a08\u8207\u88fd\u7a0b\u5de5\u7a0b\u5e2b\u800c\u8a00\uff0c\u63d0\u65e9\u719f\u6089 NIL \u7684 \u6a21\u5177\u8a2d\u8a08\u3001\u6a39\u8102\u9078\u578b\u8207\u5c0d\u4f4d\u7b56\u7565\uff0c\u4e0d\u50c5\u80fd\u5728\u5148\u9032\u5c01\u88dd\u8207\u5149\u5b78\u5143\u4ef6\u6436\u5360\u6280\u8853\u512a\u52e2\uff0c\u4e5f\u70ba\u4e0b\u4e00\u4e16\u4ee3\u6676\u7247\u88fd\u7a0b\u5960\u5b9a\u57fa\u790e\u3002<\/p>\n\n\n\n<div style=\"height:var(--wp--preset--spacing--30)\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<h5 class=\"wp-block-heading has-text-align-center\" id=\"\u60f3\u4e86\u89e3\u6709\u95dc\u7ba1\u87ba\u7d0b\u3001\u76f4\u87ba\u7d0b\u3001\u9310\u87ba\u7d0b\u3001\u5c3a\u5bf8\u8868\u793a\u3001\u82f1\u5236\u7ba1\u87ba\u7d0b\u3001\u516c\u5236\u7ba1\u87ba\u7d0b\u7684\u77e5\u8b58\u55ce\uff1f-\u5ef6\u4f38\u95b1\u8b80\uff1a\u300a\u7ba1\u87ba\u7d0b\u767e\u767e\u7a2e-\u4f60\u90fd\u8a8d\u8b58\u55ce-\u300b\">\u60f3\u4e86\u89e3\u6709\u95dc\u6c2e\u5316\u93b5(GaN)\u3001\u78b3\u5316\u77fd\u7b49\u529f\u7387\u5143\u4ef6\u7684\u77e5\u8b58\u55ce\uff1f <br>Further Reading :<a href=\"https:\/\/www.taichungbro.com\/en\/\" data-type=\"link\" data-id=\"https:\/\/taichungbro.com\/2023\/10\/28\/screw\/\" target=\"_blank\" rel=\"noopener\">\u300a\u70ba\u4ec0\u9ebc\u6c2e\u5316\u93b5\uff08GaN\uff09\u6210\u70ba\u65b0\u4e00\u4ee3\u529f\u7387\u5143\u4ef6\u7684\u95dc\u9375\u6750\u6599\uff1f\u300b<\/a><\/h5>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<div style=\"height:11px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>\u5948\u7c73\u58d3\u5370 Lithography \u4ee5\u76f4\u63a5\u58d3\u6a21\u8907\u88fd 10 nm \u7b49\u7d1a\u5716\u5f62\uff0c\u8a2d\u5099\u6210\u672c\u50c5 EUV \u4e00\u6210\u3001\u80fd\u8017\u964d\u4e5d\u6210\u3002\u672c\u6587\u6df1\u5165\u6bd4\u8f03\u89e3\u6790\u5ea6\u3001\u7522\u80fd\u3001L10 \u6a21\u5177\u58fd\u547d\u8207\u7f3a\u9677\u5bc6\u5ea6\uff0c\u89e3\u6790 Canon \u8207 EVG \u6700\u65b0\u8a66\u7522\u6578\u64da\uff0c\u8a55\u4f30 NIL \u5728 2 nm \u7bc0\u9ede\u53d6\u4ee3\u6216\u88dc\u4f4d\u5149\u523b\u7684\u53ef\u884c\u6027\uff0c\u4e26\u6307\u51fa\u672a\u4f86\u6df7\u5408\u88fd\u7a0b\u767c\u5c55\u65b9\u5411\u3002<\/p>","protected":false},"author":2,"featured_media":3425,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[45],"tags":[334,335,333,332],"class_list":["post-3421","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industrial-knowledge","tag-euv","tag-nil","tag-333","tag-332"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts\/3421","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/comments?post=3421"}],"version-history":[{"count":0,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts\/3421\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/media\/3425"}],"wp:attachment":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/media?parent=3421"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/categories?post=3421"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/tags?post=3421"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}