{"id":3448,"date":"2025-07-29T22:25:52","date_gmt":"2025-07-29T14:25:52","guid":{"rendered":"https:\/\/taichungbro.com\/?p=3448"},"modified":"2025-07-29T22:25:54","modified_gmt":"2025-07-29T14:25:54","slug":"semiconductor-annealing","status":"publish","type":"post","link":"https:\/\/www.taichungbro.com\/en\/2025\/07\/29\/semiconductor-annealing\/","title":{"rendered":"\u534a\u5c0e\u9ad4\u88fd\u7a0b\u4e2d\u7684\u9000\u706b\u5230\u5e95\u5728\u505a\u4ec0\u9ebc\uff1f\u5f9e\u6d3b\u5316\u5230\u61c9\u529b\u91cb\u653e\u7684\u5168\u89e3\u6790"},"content":{"rendered":"<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<div class=\"wp-block-rank-math-toc-block\" id=\"rank-math-toc\"><h2>Table of Content<\/h2><nav><ul><li class=\"\"><a href=\"#1-\u9000\u706b\u7684\u71b1\u52d5\u529b\u5b78\u57fa\u790e\uff1a\u64f4\u6563\u8207\u6676\u683c\u91cd\u5efa\">1. \u9000\u706b\u7684\u71b1\u52d5\u529b\u5b78\u57fa\u790e\uff1a\u64f4\u6563\u8207\u6676\u683c\u91cd\u5efa<\/a><\/li><li class=\"\"><a href=\"#2-\u9000\u706b\u5728\u534a\u5c0e\u9ad4\u88fd\u7a0b\u7684\u4e09\u5927\u6838\u5fc3\u4efb\u52d9\">2. \u9000\u706b\u5728\u534a\u5c0e\u9ad4\u88fd\u7a0b\u7684\u4e09\u5927\u6838\u5fc3\u4efb\u52d9<\/a><ul><li class=\"\"><a href=\"#2-1-\u96fb\u6027\u6d3b\u5316\uff1a\u8b93\u647b\u96dc\u771f\u7684\u8b8a\u6210\u300c\u81ea\u7531\u8f09\u5b50\u300d\">2.1 \u96fb\u6027\u6d3b\u5316\uff1a\u8b93\u647b\u96dc\u771f\u7684\u8b8a\u6210\u300c\u81ea\u7531\u8f09\u5b50\u300d<\/a><\/li><li class=\"\"><a href=\"#2-2-\u7f3a\u9677\u4fee\u5fa9\u8207\u61c9\u529b\u91cb\u653e\">2.2 \u7f3a\u9677\u4fee\u5fa9\u8207\u61c9\u529b\u91cb\u653e<\/a><\/li><li class=\"\"><a href=\"#2-3-\u77fd\u5316\u7269\u8207\u63a5\u9ede\u5f62\u6210\">2.3 \u77fd\u5316\u7269\u8207\u63a5\u9ede\u5f62\u6210<\/a><\/li><\/ul><\/li><li class=\"\"><a href=\"#3-\u9000\u706b\u53c3\u6578\u5982\u4f55\u5de6\u53f3\u96fb\u6027\u8207\u6a5f\u68b0\u61c9\u529b\uff1f\">3. \u9000\u706b\u53c3\u6578\u5982\u4f55\u5de6\u53f3\u96fb\u6027\u8207\u6a5f\u68b0\u61c9\u529b\uff1f<\/a><ul><li class=\"\"><a href=\"#4-\u5148\u9032\u9000\u706b\u6280\u8853\uff1a\u901f\u5ea6\u3001\u5747\u52fb\u5ea6\u8207\u71b1-budget-\u7684\u4e09\u91cd\u9032\u5316\">4. \u5148\u9032\u9000\u706b\u6280\u8853\uff1a\u901f\u5ea6\u3001\u5747\u52fb\u5ea6\u8207\u71b1 Budget \u7684\u4e09\u91cd\u9032\u5316<\/a><\/li><\/ul><\/li><\/ul><\/nav><\/div>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<p>\u5728\u73fe\u4ee3\u534a\u5c0e\u9ad4\u88fd\u7a0b\u4e2d\uff0c\u96e2\u5b50\u4f48\u690d\u3001\u8755\u523b\u3001\u91d1\u5c6c\u5316\u7b49\u6b65\u9a5f\u6703\u5728\u77fd\u6676\u683c\u5167\u7559\u4e0b\u9ad8\u6fc3\u5ea6\u7f3a\u9677\u8207\u6b98\u9918\u61c9\u529b\uff1b\u82e5\u4e0d\u7d93\u904e\u300c\u9000\u706b (Annealing)\u300d\u4fee\u5fa9\uff0c\u9019\u4e9b\u7f3a\u9677\u5c07\u62c9\u4f4e\u8f09\u5b50\u9077\u79fb\u7387\u3001\u5347\u9ad8\u63a5\u89f8\u96fb\u963b\uff0c\u751a\u81f3\u5c0e\u81f4\u5c01\u88dd\u5f8c\u7684\u71b1\u6a5f\u68b0\u7834\u88c2\u3002\u9000\u706b\u6280\u8853\u5f9e\u6700\u65e9 1970 \u5e74\u4ee3\u7684\u300c\u9577\u6642\u9593\u7210\u7ba1\u300d\u6f14\u9032\u5230\u4eca\u65e5\u50c5\u9700\u6578\u6beb\u79d2\u7684\u96f7\u5c04\u5c16\u5cf0\u9000\u706b (LSA)\uff0c\u7e2e\u77ed\u71b1\u8655\u7406\u6642\u9593\u4e09\u500b\u6578\u91cf\u7d1a\uff0c\u540c\u6642\u5c07\u71b1\u64f4\u6563\u98a8\u96aa\u964d\u5230\u6700\u4f4e\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"1-\u9000\u706b\u7684\u71b1\u52d5\u529b\u5b78\u57fa\u790e\uff1a\u64f4\u6563\u8207\u6676\u683c\u91cd\u5efa\">1. \u9000\u706b\u7684\u71b1\u52d5\u529b\u5b78\u57fa\u790e\uff1a\u64f4\u6563\u8207\u6676\u683c\u91cd\u5efa<\/h2>\n\n\n\n<p>\u9000\u706b\u53ef\u8996\u70ba\u5728\u63a7\u5236\u6c23\u6c1b\u4e2d\u52a0\u71b1\u534a\u5c0e\u9ad4\uff0c\u4ee5\u8b93\u539f\u5b50\u64f4\u6563\u81f3\u80fd\u91cf\u8f03\u4f4e\u7684\u6676\u683c\u4f4d\u7f6e\u4e26\u91cb\u653e\u4f4d\u932f\u8207\u7a7a\u4f4d\u6240\u5132\u5b58\u7684\u5f48\u6027\u80fd\u3002\u5c0d\u96e2\u5b50\u4f48\u690d\u5f8c\u7684\u77fd\u800c\u8a00\uff0c\u6d3b\u5316\u904e\u7a0b\u53ef\u7528 Arrhenius \u5f62\u5f0f\u63cf\u8ff0\uff1a <\/p>\n\n\n\n<p>Activation&nbsp;Fraction\u221d1\u2212e<sup>&#8211;<\/sup><\/p>\n\n\n\n<p>\u5176\u4e2d E<sub>a<\/sub>\u70ba\u6d3b\u5316\u80fd\uff0c\u5c0d\u78f7\u690d\u5165\u77fd\u7d04 2.8 e<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u6eab (T)\uff1a\u52a0\u901f\u647b\u96dc\u539f\u5b50\u79fb\u52d5\u5230\u53d6\u4ee3\u4f4d\uff0c\u91cb\u653e\u81ea\u7531\u8f09\u5b50\u3002<\/li>\n\n\n\n<li>\u77ed\u6642\u9593 (t)\uff1a\u907f\u514d\u904e\u5ea6\u6a6b\u5411\u64f4\u6563\u9020\u6210\u77ed\u901a\u9053\u6548\u61c9\u3002<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"2-\u9000\u706b\u5728\u534a\u5c0e\u9ad4\u88fd\u7a0b\u7684\u4e09\u5927\u6838\u5fc3\u4efb\u52d9\">2. \u9000\u706b\u5728\u534a\u5c0e\u9ad4\u88fd\u7a0b\u7684\u4e09\u5927\u6838\u5fc3\u4efb\u52d9<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\" id=\"2-1-\u96fb\u6027\u6d3b\u5316\uff1a\u8b93\u647b\u96dc\u771f\u7684\u8b8a\u6210\u300c\u81ea\u7531\u8f09\u5b50\u300d\">2.1 \u96fb\u6027\u6d3b\u5316\uff1a\u8b93\u647b\u96dc\u771f\u7684\u8b8a\u6210\u300c\u81ea\u7531\u8f09\u5b50\u300d<\/h3>\n\n\n\n<p>\u96e2\u5b50\u4f48\u690d\u5c07\u647b\u96dc\u539f\u5b50\u6253\u9032\u6676\u683c\u9593\u9699\uff1b\u53ea\u6709\u9000\u706b\u80fd\u628a\u5b83\u5011\u62c9\u56de\u300c\u53d6\u4ee3\u4f4d\u300d\uff0c\u4f7f n \u578b\u78f7 \/ p \u578b\u787c\u771f\u6b63\u8ca2\u737b\u5c0e\u96fb\u3002\u5be6\u9a57\u986f\u793a\uff0c\u5c0d 600 \u00b0C \/ 10 s RTA \u5f8c\u78f7\u690d\u77fd\u7247\u7684\u65b9\u584a\u96fb\u963b\u53ef\u5f9e 1 k\u03a9\/\u25a1 \u964d\u81f3 &lt; 100 \u03a9\/\u25a1\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\" id=\"2-2-\u7f3a\u9677\u4fee\u5fa9\u8207\u61c9\u529b\u91cb\u653e\">2.2 \u7f3a\u9677\u4fee\u5fa9\u8207\u61c9\u529b\u91cb\u653e<\/h3>\n\n\n\n<p>\u7b49\u6548 Von-Mises \u61c9\u529b\u6703\u5728\u71b1\u5faa\u74b0\u4e2d\u53cd\u8986\u4f5c\u7528\u65bc\u9598\u6975\u5806\u758a\uff1b\u5229\u7528 350 \u00b0C \u7684\u300c\u61c9\u529b\u91cb\u653e\u9000\u706b (Stress-Relief Anneal, SRA)\u300d\u53ef\u4f7f\u975e\u6676\u5c64\u518d\u7d50\u6676\u4e26\u964d\u4f4e\u77fd-\u4e8c\u6c27\u5316\u77fd\u4ecb\u9762\u7f3a\u9677\u5bc6\u5ea6 25 %<\/p>\n\n\n\n<h3 class=\"wp-block-heading\" id=\"2-3-\u77fd\u5316\u7269\u8207\u63a5\u9ede\u5f62\u6210\">2.3 \u77fd\u5316\u7269\u8207\u63a5\u9ede\u5f62\u6210<\/h3>\n\n\n\n<p>\u91d1\u5c6c\/\u77fd\u63a5\u89f8\u5fc5\u9808\u5f62\u6210\u4f4e\u96fb\u963b\u77fd\u5316\u7269 (NiSi, CoSi\u2082)\u3002\u5178\u578b\u93b3\u77fd\u5316\u9700\u8981 450\u2013550 \u00b0C\u300130 s \u7684 RTA\uff1bTEM \u539f\u4f4d\u89c0\u5bdf\u6307\u51fa\u93b3\u539f\u5b50\u5c07\u6cbf\u77fd\u7f3a\u9677\u64f4\u6563\u4e26\u751f\u6210\u7dfb\u5bc6 NiSi\uff0c\u76f8\u8f03\u672a\u9000\u706b\u6a23\u54c1\u63a5\u89f8\u96fb\u963b\u964d\u4f4e\u4e00\u500b\u6578\u91cf\u7d1a\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"3-\u9000\u706b\u53c3\u6578\u5982\u4f55\u5de6\u53f3\u96fb\u6027\u8207\u6a5f\u68b0\u61c9\u529b\uff1f\">3. \u9000\u706b\u53c3\u6578\u5982\u4f55\u5de6\u53f3\u96fb\u6027\u8207\u6a5f\u68b0\u61c9\u529b\uff1f<\/h2>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u9000\u706b\u985e\u578b<\/th><th>\u6eab\u5ea6 (\u00b0C)<\/th><th>\u6301\u6eab\u6642\u9593<\/th><th>\u6c23\u6c1b<\/th><th>\u5178\u578b\u61c9\u7528<\/th><th>\u5f71\u97ff\u6982\u8ff0<\/th><\/tr><\/thead><tbody><tr><td>\u7210\u7ba1\u9000\u706b<\/td><td>800\u20131050<\/td><td>30 min\u20132 h<\/td><td>N\u2082\/H\u2082<\/td><td>\u77fd\u6676\u518d\u751f\u3001\u529f\u7387\u5668\u4ef6<\/td><td>\u9ad8\u6d3b\u5316\uff0c\u4f46\u6a6b\u5411\u64f4\u6563\u5927<\/td><\/tr><tr><td>RTA<\/td><td>900\u20131100<\/td><td>5\u201360 s<\/td><td>N\u2082 or Ar<\/td><td>CMOS \u647b\u96dc\u6d3b\u5316<\/td><td>\u6d3b\u5316\u8db3\u5920\uff0c\u64f4\u6563\u53d7\u63a7<\/td><\/tr><tr><td>Spike Anneal<\/td><td>1050\u20131150<\/td><td>&lt; 1 s<\/td><td>N\u2082<\/td><td>7 nm \u4ee5\u4e0b\u908f\u8f2f<\/td><td>\u5e7e\u4e4e\u96f6\u6a6b\u5411\u64f4\u6563<\/td><\/tr><tr><td>LSA<\/td><td>1300\u20131400 (\u8868\u9762)<\/td><td>100 \u00b5s\u20132 ms<\/td><td>Ar<\/td><td>3 nm \u7bc0\u9ede\u3001SiGe \u61c9\u8b8a\u5c64<\/td><td>\u8868\u5c64\u5feb\u901f\u6d3b\u5316\uff0c\u57fa\u5e95\u4f4e\u6eab<\/td><\/tr><\/tbody><\/table><figcaption class=\"wp-element-caption\">\u5728 3 nm \u53ca\u4ee5\u4e0b\u7bc0\u9ede\uff0c\u6a6b\u5411\u64f4\u6563 1 nm \u5373\u53ef\u80fd\u541e\u566c\u9598\u6975\u4e0b\u534a\u500b\u901a\u9053\u9577\uff1b\u56e0\u6b64\u300c\u6eab\u5ea6\u5c16\u5cf0 + \u6beb\u79d2\u7d1a\u6642\u9577\u300d\u5df2\u6210\u6a19\u914d\u3002<\/figcaption><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\" id=\"4-\u5148\u9032\u9000\u706b\u6280\u8853\uff1a\u901f\u5ea6\u3001\u5747\u52fb\u5ea6\u8207\u71b1-budget-\u7684\u4e09\u91cd\u9032\u5316\">4. \u5148\u9032\u9000\u706b\u6280\u8853\uff1a\u901f\u5ea6\u3001\u5747\u52fb\u5ea6\u8207\u71b1 Budget \u7684\u4e09\u91cd\u9032\u5316<\/h3>\n\n\n\n<figure class=\"wp-block-table aligncenter\"><table class=\"has-fixed-layout\"><thead><tr><th>\u6280\u8853<\/th><th>\u80fd\u91cf\u8026\u5408\u6a5f\u5236<\/th><th>\u6eab\u5ea6\u5c16\u5cf0<br>\u6301\u6eab\u6642\u9593<\/th><th>\u6676\u5713\u9762\u5167\u6eab\u5dee (3\u03c3)<\/th><th>\u9069\u7528\u7bc0\u9ede<br>Application:Application:<\/th><th>\u7279\u8272\u8207\u6311\u6230<\/th><\/tr><\/thead><tbody><tr><td>\u591a\u5340\u6bb5 RTA <\/td><td>12 \u00d7 LED \u6216\u77f3\u82f1\u71c8\u9663\u5217\u7368\u7acb\u63a7\u529f<\/td><td>900\u20131150 \u00b0C \/ 5\u201360 s<\/td><td>\u00b13 \u00b0C \u4ee5\u5167<\/td><td>28 nm \u2192 7 nm (\u647b\u96dc\u6d3b\u5316)<\/td><td>\u53ef\u5206\u5340\u88dc\u511f\u71b1\u5f71\uff1b\u9700\u7cbe\u5bc6\u5149\u901a\u91cf\u6821\u6b63\u9632\u201c\u71b1\u5cf6\u201d<\/td><\/tr><tr><td>Flash Lamp Anneal<\/td><td>\u6c19\u9583\u5149\u71c8\uff0c\u8108\u885d 0.5\u201320 ms<\/td><td>\u8868\u9762 1250\u20131350 \u00b0C \/ 0.5\u20135 ms<\/td><td>\u00b14 \u00b0C<\/td><td>14 nm \u2192 5 nm (\u8584\u9ad4 FinFET)<\/td><td>\u55ae\u8108\u885d\u5b8c\u6210\u6d3b\u5316\uff1b\u4f46 GaN\u3001SiC \u8868\u9762\u6613\u71b1\u5d29\u9700\u96f7\u5c04\u6e05\u6d17<\/td><\/tr><tr><td>\u96f7\u5c04\u5c16\u5cf0\u9000\u706b (LSA)<\/td><td>308 nm XeCl \u96f7\u5c04\u7dda\u5f62\u675f<\/td><td>1300\u20131450 \u00b0C \/ 100\u2013800 \u00b5s<\/td><td>\u00b11 \u00b0C<\/td><td>5 nm \u2192 2 nm (EUV BEOL\u3001SiGe \u61c9\u8b8a\u5c64)<\/td><td>\u71b1\u68af\u5ea6 &gt; 500 K\/\u00b5m \u50c5\u52a0\u71b1 50 nm \u6df1\u5ea6\uff0c\u6a6b\u5411\u64f4\u6563 &lt; 0.5 nm\uff1b\u9700\u771f\u7a7a\u8f09\u53f0\u4ee5\u6291\u5236\u6c27\u5316<\/td><\/tr><tr><td>\u5fae\u6ce2\/\u96fb\u611f\u8026\u5408\u9000\u706b<\/td><td>5.8 GHz \u5fae\u6ce2\u6216 13.56 MHz RF \u7dda\u5708<\/td><td>\u91d1\u5c6c\u5c64\u5c40\u90e8 900\u20131000 \u00b0C \/ 10\u201350 \u00b5s<\/td><td>\u00b15 \u00b0C<\/td><td>\u65b0\u578b 3D IC TSV \u9000\u706b\u3001\u91d1\u5c6c\u914d\u7dda\u61c9\u529b\u91cb\u653e<\/td><td>\u76f4\u63a5\u8026\u5408\u91d1\u5c6c\u7dda\u4e0d\u52a0\u71b1\u77fd\u57fa\u5e95\uff0c\u80fd\u8017\u964d 40 %\uff1b\u9700\u9632\u6b62\u96fb\u5f27\u653e\u96fb<\/td><\/tr><tr><td>\u80cc\u9762\u96f7\u5c04\u9000\u706b<\/td><td>532 nm \u534a\u5c0e\u9ad4\u96f7\u5c04\u7a7f\u900f\u73bb\u7483\u8f09\u677f<\/td><td>1100\u20131300 \u00b0C \/ 200\u2013600 \u00b5s<\/td><td>\u00b12 \u00b0C<\/td><td>\u8584\u6676\u5713 &lt; 50 \u00b5m\u3001CIS\u3001MEMS<\/td><td>\u8868\u5c64\u8986\u91d1\u5c6c\u6216\u963b\u64cb\u5c64\u6642\u4ecd\u53ef\u7531\u80cc\u9762\u6d3b\u5316\uff1b\u9700\u81e8\u6642\u8cbc\u9776\u73bb\u7483\u8f14\u52a9\u642c\u904b<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p><strong>\u9032\u5316\u4eae\u9ede<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li>\u71b1 Budget \u58d3\u7e2e\u4e09\u500b\u6578\u91cf\u7d1a<br>\u3000\u4ee5 5 nm FinFET \u7684\u78f7\u6e90\u6975\u647b\u96dc\u70ba\u4f8b\uff0c\u50b3\u7d71\u7210\u7ba1\u9000\u706b\u9700\u8981 1000 \u00b0C \u00d7 60 min \u2248 3600 kJ\/wafer\uff1bLSA \u53ea\u9700 1350 \u00b0C \u00d7 500 \u00b5s \u2248 0.9 kJ\/wafer\uff0c\u80fd\u91cf\u4e0b\u964d\u8fd1\u56db\u5343\u500d\uff0c\u986f\u8457\u6e1b\u5c11\u6a6b\u5411\/\u7e31\u5411\u64f4\u6563\u3002<\/li>\n\n\n\n<li>\u5747\u52fb\u5ea6\u8207\u8a2d\u5099\u6574\u5408<br>\u3000\u591a\u5340\u6bb5 RTA \u8207 FLA \u7686\u5df2\u6574\u5408 in-situ pyrometer + AI \u9810\u6e2c\u6a21\u578b\uff0c\u53ef\u52d5\u614b\u8abf\u6574\u5404\u5340\u529f\u7387\uff1b\u6700\u512a\u6848\u4f8b\uff08\u4e09\u661f 5 nm Line\uff09\u55ae\u7247 \u0394R\u209b &lt; 1.5 \u03a9\/\u25a1\u3002<\/li>\n\n\n\n<li>\u6750\u6599\u76f8\u5bb9\u6027<br>\u3000- SiGe\/SiP \u61c9\u8b8a\u5c64\uff1aLSA \u53ef\u5728\u8868\u5c64\u77ed\u66ab\u9032\u5165\u904e\u7194\u6eab\u5340\u57df (T &gt; T\u2098 + 20 K)\uff0c\u8a98\u5c0e\u81ea\u4fee\u5fa9\u518d\u7d50\u6676\uff0c\u9077\u79fb\u7387 +18 %\u3002<br>\u3000- \u91d1\u5c6c-\u9ad8\u4ecb\u96fb(MHK) \u5806\u758a\uff1aSpike + \u00b5-Wave \u96d9\u6bb5\u9000\u706b\u907f\u514d HfO\u2082 \u7d50\u6676\u7c97\u5316\uff0c\u7b49\u6548\u6c27\u5316\u5c64\u539a\u5ea6 (EOT) \u4e0b\u964d 0.3 \u00c5 \u800c\u6f0f\u96fb\u4e0d\u5347\u9ad8\u3002<\/li>\n\n\n\n<li>\u88fd\u7a0b\u7a97\u53e3\u7ba1\u7406<br>\u3000\u5148\u9032\u7dda\u9ad4\u591a\u63a1\u300cCluster Tool\u300d\u5c07\u96e2\u5b50\u4f48\u690d\u3001\u53bb\u81a0\u3001\u6e05\u6d17\u3001RTA\/LSA \u7f6e\u65bc\u540c\u8154\u5ba4\u6216\u771f\u7a7a\u8f49\u76e4\u5167\uff0c\u524d\u5f8c\u7b49\u5f85\u6642\u9593 &lt; 60 s\uff0c\u9632\u6b62\u690d\u5165\u5f8c\u7684\u81ea\u767c\u7f3a\u9677\u805a\u96c6\u3002<\/li>\n<\/ol>\n\n\n\n<p>\u9019\u4e9b\u6280\u8853\u7684\u6838\u5fc3\u5171\u8b58\u662f\uff1a\u628a\u71b1\u7559\u5728\u8868\u9762\u3001\u628a\u6642\u9593\u7e2e\u5230\u6beb\u79d2\u3001\u628a\u80fd\u91cf\u96c6\u4e2d\u5728\u9700\u8981\u6d3b\u5316\u7684\u4f4d\u7f6e\u3002\u672a\u4f86\u7684 2 nm \u751a\u81f3 \u00c5 \u7d1a\u7bc0\u9ede\uff0c\u696d\u754c\u6b63\u7814\u7a76 \u6975\u7d2b\u5916\u8108\u885d-\u8a98\u5c0e\u9000\u706b (EUV-PIA) \u8207 \u98db\u79d2\u96f7\u5c04\u9078\u5340\u9000\u706b\uff0c\u5c07\u7a7a\u9593\u9078\u64c7\u6027\u7d30\u5206\u5230\u5fae\u7c73\u7d1a\uff0c\u6216\u8a31\u4e0d\u4e45\u5f8c\u5c31\u80fd\u5728\u7279\u5b9a\u5340\u6bb5\u300c\u9ede\u72c0\u300d\u6d3b\u5316\uff0c\u5b8c\u5168\u89e3\u9664\u71b1 Budget \u5c0d\u5143\u4ef6\u5e7e\u4f55\u6975\u9650\u7684\u675f\u7e1b\u3002<\/p>\n\n\n\n<p>\u9000\u706b\u9060\u4e0d\u53ea\u662f\u300c\u628a\u6676\u5713\u4e1f\u9032\u70e4\u7bb1\u300d\u90a3\u9ebc\u7c21\u55ae\uff1b\u5b83\u540c\u6642\u80a9\u8ca0 \u647b\u96dc\u6d3b\u5316\u3001\u7f3a\u9677\u4fee\u5fa9\u3001\u61c9\u529b\u91cb\u653e\u8207\u63a5\u89f8\u96fb\u963b\u512a\u5316 \u7684\u4efb\u52d9\u3002\u96a8\u8457\u908f\u8f2f\u7bc0\u9ede\u903c\u8fd1 2 nm\uff0c\u50b3\u7d71\u9577\u6642\u9593\u7210\u7ba1\u9000\u706b\u5df2\u96e3\u517c\u9867\u6d3b\u5316\u8207\u64f4\u6563\u6291\u5236\uff1b\u53d6\u800c\u4ee3\u4e4b\u7684 RTA \/ Spike \/ LSA \u5c07\u71b1\u8655\u7406\u7a97\u53e3\u58d3\u7e2e\u5230\u6beb\u79d2\u7d1a\uff0c\u4e14\u914d\u5408\u7d05\u5916\u3001\u96f7\u5c04\u6216\u5fae\u6ce2\u80fd\u91cf\u8026\u5408\uff0c\u5be6\u73fe\u300c\u8868\u5c64\u9ad8\u6eab\u3001\u9ad4\u5167\u4f4e\u6eab\u300d\u7684\u7406\u60f3\u6eab\u5ea6\u68af\u5ea6\u3002\u672a\u4f86\uff0c\u9000\u706b\u66f4\u5c07\u7d50\u5408 AI \u6eab\u63a7\u56de\u6388 \u8207 \u539f\u4f4d\u963b\u503c\u76e3\u6e2c\uff0c\u5373\u6642\u8abf\u6574\u529f\u7387\u66f2\u7dda\uff0c\u78ba\u4fdd\u6bcf\u7247\u6676\u5713\u90fd\u80fd\u5728\u6700\u5c0f\u71b1 Budget \u4e0b\u9054\u5230\u6700\u5927\u96fb\u6027\u6536\u76ca\u3002\u5c0d\u88fd\u7a0b\u8207\u5c01\u88dd\u5de5\u7a0b\u5e2b\u800c\u8a00\uff0c\u63d0\u65e9\u5728 \u8a2d\u8a08 PDK \u968e\u6bb5\u5efa\u7acb\u300c\u9000\u706b-\u64f4\u6563-\u6a5f\u68b0\u61c9\u529b\u300d\u4e09\u7dad\u6a21\u578b\uff0c\u4e26\u4ee5\u5be6\u9a57\u6578\u64da\u6821\u6b63\uff0c\u5c31\u80fd\u628a\u826f\u7387\u8207\u53ef\u9760\u5ea6\u98a8\u96aa\u964d\u5230\u6700\u4f4e\uff0c\u9019\u6b63\u662f\u9000\u706b\u771f\u6b63\u7684\u50f9\u503c\u6240\u5728\u3002<\/p>\n\n\n\n<div style=\"height:var(--wp--preset--spacing--30)\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<h5 class=\"wp-block-heading has-text-align-center\" id=\"\u60f3\u4e86\u89e3\u6709\u95dc\u7ba1\u87ba\u7d0b\u3001\u76f4\u87ba\u7d0b\u3001\u9310\u87ba\u7d0b\u3001\u5c3a\u5bf8\u8868\u793a\u3001\u82f1\u5236\u7ba1\u87ba\u7d0b\u3001\u516c\u5236\u7ba1\u87ba\u7d0b\u7684\u77e5\u8b58\u55ce\uff1f-\u5ef6\u4f38\u95b1\u8b80\uff1a\u300a\u7ba1\u87ba\u7d0b\u767e\u767e\u7a2e-\u4f60\u90fd\u8a8d\u8b58\u55ce-\u300b\">\u60f3\u4e86\u89e3\u6709\u95dc\u534a\u5c0e\u9ad4\u3001\u534a\u5c0e\u9ad4\u6750\u6599\u3001\u80fd\u9699\u7684\u77e5\u8b58\u55ce\uff1f <br>Further Reading :<a href=\"https:\/\/www.taichungbro.com\/en\/2024\/08\/21\/band-gap\/\" data-type=\"link\" data-id=\"https:\/\/taichungbro.com\/2023\/10\/28\/screw\/\" target=\"_blank\" rel=\"noopener\">\u300a\u300c\u80fd\u9699\u300d\u662f\u4ec0\u9ebc\uff1f\u89e3\u78bc\u534a\u5c0e\u9ad4\u6750\u6599\u7684\u95dc\u9375\u300b<\/a><\/h5>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<div style=\"height:11px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>\u9000\u706b\u662f\u534a\u5c0e\u9ad4\u88fd\u7a0b\u6d3b\u5316\u647b\u96dc\u8207\u4fee\u5fa9\u7f3a\u9677\u7684\u95dc\u9375\u74b0\u7bc0\u3002\u672c\u6587\u6df1\u5165\u6bd4\u8f03\u7210\u7ba1\u3001RTA\u3001LSA \u8207\u5fae\u6ce2\u9000\u706b\u7684\u6eab\u5ea6\u5c16\u5cf0\u3001\u71b1 Budget \u8207\u5747\u52fb\u5ea6\uff0c\u4e26\u8aaa\u660e\u5982\u4f55\u5728 5 nm \u4ee5\u964d\u7bc0\u9ede\u5c07\u6a6b\u5411\u64f4\u6563\u58d3\u81f3 <0.5 nm\uff0c\u540c\u6642\u964d\u4f4e\u61c9\u529b\u8207\u63a5\u89f8\u96fb\u963b\uff0c\u6253\u9020\u9ad8\u9077\u79fb\u7387\u5148\u9032\u5143\u4ef6\u3002\n<\/p>","protected":false},"author":2,"featured_media":3465,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[45],"tags":[351,350,353,352,349],"class_list":["post-3448","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industrial-knowledge","tag-lsa","tag-rta","tag-353","tag-budget","tag-349"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts\/3448","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/comments?post=3448"}],"version-history":[{"count":0,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts\/3448\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/media\/3465"}],"wp:attachment":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/media?parent=3448"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/categories?post=3448"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/tags?post=3448"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}