{"id":3571,"date":"2025-09-22T23:16:55","date_gmt":"2025-09-22T15:16:55","guid":{"rendered":"https:\/\/www.taichungbro.com\/?p=3571"},"modified":"2025-09-22T23:16:57","modified_gmt":"2025-09-22T15:16:57","slug":"mems","status":"publish","type":"post","link":"https:\/\/www.taichungbro.com\/en\/2025\/09\/22\/mems\/","title":{"rendered":"MEMS\u5fae\u6a5f\u96fb\u88fd\u9020\u6d41\u7a0b\u89e3\u6790\uff1a\u77fd\u6676\u5713\u5230\u611f\u6e2c\u5668\u7684\u8a95\u751f"},"content":{"rendered":"<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<div class=\"wp-block-rank-math-toc-block\" id=\"rank-math-toc\"><h2>Table of Content<\/h2><nav><ul><li class=\"\"><a href=\"#\u88fd\u9020\u5168\u89bd\">\u88fd\u9020\u5168\u89bd<\/a><\/li><li class=\"\"><a href=\"#\u79d1\u5b78\u539f\u7406\u8207\u8a2d\u8a08\u95dc\u9375\">\u79d1\u5b78\u539f\u7406\u8207\u8a2d\u8a08\u95dc\u9375<\/a><\/li><li class=\"\"><a href=\"#\u5fae\u5f71\u3001\u6c89\u7a4d\u3001drie-\u8207\u9375\u5408\">\u5fae\u5f71\u3001\u6c89\u7a4d\u3001DRIE \u8207\u9375\u5408<\/a><\/li><li class=\"\"><a href=\"#\u5c01\u88dd\u8207\u6e2c\u8a66\u5230\u91cf\u7522\">\u5c01\u88dd\u8207\u6e2c\u8a66\u5230\u91cf\u7522<\/a><\/li><\/ul><\/nav><\/div>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<p>\u4f60\u6bcf\u5929\u62ff\u5728\u624b\u4e0a\u7684\u624b\u6a5f\u3001\u958b\u8eca\u7528\u7684\u5b89\u5168\u7cfb\u7d71\u3001\u624b\u8155\u4e0a\u7684\u624b\u9336\uff0c\u5176\u5be6\u90fd\u85cf\u8457\u4e00\u9846\u9846\u6bd4\u982d\u9aee\u9084\u7d30\u5c0f\u7684\u5fae\u6a5f\u96fb\u5143\u4ef6\uff0c\u4e5f\u7a31\u4e4bMEMS\u3002\u5b83\u5011\u50cf\u662f\u5fae\u7e2e\u7248\u6a5f\u68b0\uff1a\u6703\u611f\u89ba\u52a0\u901f\u5ea6\u3001\u58d3\u529b\u3001\u8072\u97f3\u6216\u89d2\u901f\u5ea6\uff0c\u4e26\u628a\u9019\u4e9b\u8b8a\u5316\u5316\u6210\u96fb\u8a0a\u865f\u3002\u9019\u4e9b\u5c0f\u6771\u897f\u600e\u9ebc\u505a\u51fa\u4f86\u7684\uff1f\u5f9e\u4e00\u7247\u5e73\u5766\u7684\u77fd\u6676\u5713\u958b\u59cb\uff0c\u900f\u904e\u5857\u5149\u963b\u8207\u66dd\u5149\u523b\u756b\u5716\u6848\u3001\u5728\u8868\u9762\u9577\u51fa\u8584\u8584\u7684\u529f\u80fd\u8584\u819c\u3001\u518d\u7528\u6df1\u53cd\u61c9\u96e2\u5b50\u8755\u523b\u6316\u51fa\u7acb\u9ad4\u7d50\u69cb\uff0c\u6700\u5f8c\u628a\u6676\u7247\u8207\u84cb\u677f\u9375\u5408\u6210\u8154\u9ad4\u4e26\u5b8c\u6210\u5c01\u88dd\u6e2c\u8a66\uff0c\u624d\u6709\u8fa6\u6cd5\u5728\u4f60\u4e0d\u6ce8\u610f\u6642\u9ed8\u9ed8\u5de5\u4f5c\u3002\u6211\u5011\u5c07\u4ee5\u6dfa\u986f\u65b9\u5f0f\u4e32\u8d77\u6574\u689d\u8def\u5f91\uff0c\u8b93\u4f60\u770b\u61c2\u4e00\u9846 MEMS \u611f\u6e2c\u5668\u7684\u300c\u51fa\u751f\u8b49\u660e\u300d\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u88fd\u9020\u5168\u89bd\">\u88fd\u9020\u5168\u89bd<\/h2>\n\n\n\n<p>\u4e00\u9846 MEMS \u5f9e\u300c\u8a2d\u8a08 \u2192 \u524d\u6bb5\u88fd\u7a0b\u2192 \u4e2d\u6bb5\u9375\u5408\u8207\u8154\u9ad4\u5f62\u6210 \u2192 \u5f8c\u6bb5\u5c01\u88dd\u8207\u6e2c\u8a66\u300d\u9010\u6b65\u5b8c\u6210\u3002\u524d\u6bb5\u5728\u77fd\u6676\u5713\u4e0a\u7528\u5fae\u5f71\u5b9a\u7fa9\u5716\u6848\uff0c\u518d\u4ee5\u8584\u819c\u6c89\u7a4d\u8207\u8755\u523b\u505a\u51fa\u61f8\u81c2\u6881\u3001\u8cea\u91cf\u584a\u3001\u53ef\u52d5\u96fb\u6975\u7b49\u7d50\u69cb\uff1b\u4e2d\u6bb5\u5e38\u4ee5\u73bb\u7483\u6216\u77fd\u84cb\u6676\u5713\u9375\u5408\uff0c\u5f62\u6210\u771f\u7a7a\u6216\u53d7\u63a7\u8154\u9ad4\uff0c\u78ba\u4fdd\u7d50\u69cb\u5177\u6709\u8a2d\u8a08\u7684\u963b\u5c3c\uff1b\u6700\u5f8c\u9032\u5230\u5f8c\u6bb5\u5c01\u88dd\uff0c\u52a0\u5165 ASIC \u6216\u8b80\u51fa\u96fb\u8def\uff0c\u4e26\u5b8c\u6210\u6821\u6b63\u3001\u6eab\u6f02\u88dc\u511f\u8207\u53ef\u9760\u5ea6\u9a57\u8b49\u3002\u6574\u9ad4\u770b\u8d77\u4f86\u50cf\u534a\u5c0e\u9ad4\uff0c\u4f46 MEMS \u591a\u4e86\u300c\u539a\u5ea6\u65b9\u5411\u7684\u6a5f\u68b0\u7d50\u69cb\u300d\u8207\u300c\u8154\u9ad4\uff0f\u6d3b\u52d5\u9593\u9699\u300d\u9019\u5169\u5927\u5143\u7d20\uff0c\u56e0\u6b64\u5728\u88fd\u7a0b\u9078\u64c7\u8207\u516c\u5dee\u7ba1\u63a7\u4e0a\u6709\u5176\u7368\u7279\u6027\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u79d1\u5b78\u539f\u7406\u8207\u8a2d\u8a08\u95dc\u9375\">\u79d1\u5b78\u539f\u7406\u8207\u8a2d\u8a08\u95dc\u9375<\/h2>\n\n\n\n<p>MEMS \u611f\u6e2c\u5668\u7684\u6838\u5fc3\u662f\u628a\u7269\u7406\u91cf\u8f49\u6210\u96fb\u8a0a\u865f\u3002\u4ee5\u5e38\u898b\u7684\u96fb\u5bb9\u5f0f\u52a0\u901f\u5ea6\u8a08\u70ba\u4f8b\uff0c\u5916\u754c\u52a0\u901f\u5ea6\u4f7f\u8cea\u91cf\u584a\u4f4d\u79fb\uff0c\u5e36\u52d5\u53ef\u52d5\u96fb\u6975\u8207\u56fa\u5b9a\u96fb\u6975\u9593\u8ddd\u6539\u8b8a\uff0c\u9020\u6210\u96fb\u5bb9\u503c\u8b8a\u5316\uff1b\u82e5\u63a1\u58d3\u963b\u5f0f\u58d3\u529b\u611f\u6e2c\u5668\uff0c\u8584\u819c\u53d7\u58d3\u5f4e\u66f2\u5f15\u8d77\u77fd\u96fb\u963b\u61c9\u8b8a\uff0c\u96fb\u963b\u503c\u6539\u8b8a\u5373\u53ef\u88ab\u60e0\u65af\u767b\u96fb\u6a4b\u8b80\u51fa\u3002\u8a2d\u8a08\u4e0a\u9700\u540c\u6642\u5e73\u8861\u9748\u654f\u5ea6\u3001\u91cf\u6e2c\u7bc4\u570d\u3001\u8a0a\u96dc\u6bd4\u8207\u5e36\u5bec\uff1b\u6a5f\u68b0\u4e0a\u7531\u5e7e\u4f55\u5c3a\u5bf8\u3001\u6750\u6599\u5f48\u6027\u6a21\u6578\u8207\u7d50\u69cb\u5f62\u72c0\u6c7a\u5b9a\u5f48\u7c27\u5e38\u6578\u8207\u5171\u632f\u983b\u7387\uff1b\u96fb\u5b78\u4e0a\u7531\u6975\u677f\u9762\u7a4d\u8207\u9593\u9699\u6c7a\u5b9a\u96fb\u5bb9\uff0c\u8a0a\u865f\u7aef\u518d\u4ee5\u653e\u5927\u3001\u6ffe\u6ce2\u8207\u8abf\u8b8a\u89e3\u8abf\u63d0\u5347\u53ef\u7528\u5ea6\u3002\u7531\u65bc MEMS \u5c3a\u5ea6\u5fae\u5c0f\uff0c\u8868\u9762\u529b\uff08\u5982\u9ecf\u8457\u3001\u51e1\u5fb7\u74e6\u529b\uff09\u76f8\u5c0d\u9ad4\u7a4d\u529b\uff08\u6163\u6027\u3001\u91cd\u529b\uff09\u66f4\u5360\u512a\u52e2\uff0c\u56e0\u6b64\u4e7e\u5f0f\u91cb\u653e\u3001\u8868\u9762\u758f\u6c34\u8655\u7406\u8207\u907f\u514d\u5361\u6b7b\u662f\u88fd\u9020\u826f\u7387\u7684\u95dc\u9375\u3002\u6b64\u5916\uff0c\u6c23\u9ad4\u963b\u5c3c\u6703\u5f37\u70c8\u5f71\u97ff\u52d5\u614b\u97ff\u61c9\uff0c\u6545\u5e38\u4ee5\u771f\u7a7a\u8154\u9ad4\u63a7\u5236 Q \u503c\uff1b\u6eab\u5ea6\u5247\u6539\u8b8a\u6750\u6599\u5f48\u6027\u8207\u96fb\u963b\uff0c\u9700\u5728\u8a2d\u8a08\u8207\u5c01\u88dd\u968e\u6bb5\u7d0d\u5165\u88dc\u511f\u6a5f\u5236\u3002\u9019\u4e9b\u8de8\u9818\u57df\u8026\u5408\u8b93 MEMS \u8a2d\u8a08\u4e0d\u50c5\u662f\u7248\u5716\u8207\u88fd\u7a0b\uff0c\u66f4\u662f\u4e00\u9580\u628a\u7269\u7406\u3001\u6750\u6599\u8207\u96fb\u8def\u540c\u6642\u512a\u5316\u7684\u7cfb\u7d71\u5de5\u7a0b\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u5fae\u5f71\u3001\u6c89\u7a4d\u3001drie-\u8207\u9375\u5408\">\u5fae\u5f71\u3001\u6c89\u7a4d\u3001DRIE \u8207\u9375\u5408<\/h2>\n\n\n\n<p>\u5be6\u4f5c\u4e0a\uff0c\u5148\u4ee5\u5fae\u5f71\u5728\u77fd\u6676\u5713\u5857\u4f48\u5149\u963b\u3001\u66dd\u5149\u986f\u5f71\u5f8c\uff0c\u5c07\u5716\u6848\u8f49\u79fb\u5230\u8584\u819c\u6216\u77fd\u672c\u9ad4\u3002\u8584\u819c\u6c89\u7a4d\u5e38\u898b LPCVD\/PECVD\uff08\u5982 SiN\u3001SiO\u2082\uff09\u6216 PVD\uff08\u91d1\u5c6c\u96fb\u6975\uff09\uff1b\u72a7\u7272\u5c64\uff08\u5982 PSG \u6216\u6c27\u5316\u5c64\uff09\u7528\u4f86\u5b9a\u7fa9\u9593\u9699\uff0c\u4e4b\u5f8c\u900f\u904e\u9078\u64c7\u6027\u8755\u523b\u79fb\u9664\uff0c\u4ee5\u91cb\u653e\u53ef\u52d5\u7d50\u69cb\u3002\u7576\u9700\u8981\u9ad8\u6df1\u5bec\u6bd4\u6e9d\u69fd\u6642\uff0c\u63a1 DRIE \u7684 Bosch \u6d41\u7a0b\uff0c\u4ee5\u4ea4\u66ff\u6027\u7684\u8755\u523b\uff0f\u5074\u58c1\u4fdd\u8b77\u9054\u6210 10:1\u201330:1 \u7684\u5074\u58c1\u76f4\u7acb\u5ea6\uff1b\u58d3\u529b\u611f\u6e2c\u8584\u819c\u5247\u591a\u4ee5\u5fae\u6a5f\u68b0\u80cc\u8755\u8207\u8584\u819c\u539a\u5ea6\u63a7\u5236\u9054\u6210\u76ee\u6a19\u9748\u654f\u5ea6\u3002\u63a5\u8457\u9032\u5165\u9375\u5408\uff1a\u967d\u6975\u9375\u5408\uff08Si\u2013\u73bb\u7483\uff09\u5728\u7d04 300\u2013450 \u00b0C\u3001\u6578\u767e\u4f0f\u7279\u4e0b\u5f62\u6210\u5f37\u9375\u7d50\uff0c\u9069\u5408\u900f\u660e\u84cb\u677f\u8207\u8154\u9ad4\u8996\u89ba\u5c0d\u4f4d\uff1bSi\u2013Si \u9375\u5408\u53ef\u7528\u8868\u9762\u6d3b\u5316\u6216\u6c2b\u9375\u5408\uff0c\u518d\u7d93\u9000\u706b\u5f37\u5316\u3002\u82e5\u88dd\u7f6e\u8981\u9ad8 Q \u503c\uff0c\u6703\u5728\u9375\u5408\u540c\u6642\u62bd\u771f\u7a7a\u4e26\u5f15\u5165\u5438\u6c23\u5291\u7dad\u6301\u8154\u5167\u58d3\u529b\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u5c01\u88dd\u8207\u6e2c\u8a66\u5230\u91cf\u7522\">\u5c01\u88dd\u8207\u6e2c\u8a66\u5230\u91cf\u7522<\/h2>\n\n\n\n<p>MEMS \u8207 ASIC \u7684\u300c\u7cfb\u7d71\u7d1a\u5c01\u88dd\u300d\uff08SiP\uff09\u8d8a\u4f86\u8d8a\u5e38\u898b\uff0c\u53ef\u7e2e\u77ed\u8d70\u7dda\u4e26\u63d0\u5347\u8a0a\u96dc\u6bd4\u3002\u5c01\u88dd\u6750\u6599\u9700\u517c\u9867\u6c23\u5bc6\u6027\u8207\u71b1\u81a8\u8139\u4fc2\u6578\u5339\u914d\uff0c\u907f\u514d\u6eab\u5faa\u9020\u6210\u96f6\u9ede\u6f02\u79fb\uff1b\u8eca\u898f\u5143\u4ef6\u5e38\u4f7f\u7528\u9676\u74f7\u6216\u91d1\u5c6c\u5c01\u88dd\u4ee5\u589e\u9032\u6c23\u5bc6\u8207\u53ef\u9760\u5ea6\u3002\u91cf\u7522\u524d\u9700\u505a\u96fb\u6027\u91cf\u6e2c\u3001\u632f\u52d5\u6383\u63cf\u8207\u6eab\u6fd5\u5faa\u74b0\u3001\u843d\u4e0b\u885d\u64ca\u7b49\u53ef\u9760\u5ea6\u6e2c\u8a66\uff1b\u58d3\u529b\u8207\u6c23\u9ad4\u611f\u6e2c\u5668\u9084\u9700\u6eaf\u6e90\u81f3\u6a19\u6e96\u91cf\u6e2c\u5e73\u53f0\u9032\u884c\u591a\u9ede\u6821\u6b63\u8207\u7dda\u6027\u5316\u3002\u51fa\u5ee0\u6821\u6b63\u53ef\u5728\u6e2c\u8a66\u6a5f\u53f0\u4ee5\u67e5\u8868\u6216\u4e00\u968e\uff0f\u4e8c\u968e\u591a\u9805\u5f0f\u4fc2\u6578\u5beb\u5165\u975e\u63ee\u767c\u6027\u8a18\u61b6\u9ad4\uff0c\u78ba\u4fdd\u6bcf\u9846\u6676\u7247\u5728\u7cfb\u7d71\u7aef\u80fd\u4ee5\u540c\u4e00\u9a45\u52d5\u53c3\u6578\u9054\u5230\u898f\u683c\u3002<\/p>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<p>\u56de\u982d\u770b\u9019\u6bb5\u65c5\u7a0b\uff0cMEMS \u7684\u8a95\u751f\u5176\u5be6\u662f\u628a\u300c\u770b\u4e0d\u898b\u7684\u5fae\u578b\u6a5f\u68b0\u300d\u96d5\u523b\u5728\u77fd\u4e0a\uff0c\u518d\u7528\u6c23\u5bc6\u5c01\u88dd\u8207\u96fb\u8def\u628a\u8a0a\u865f\u5b89\u7a69\u9001\u51fa\u3002\u6bcf\u4e00\u6b65\u90fd\u5f88\u95dc\u9375\uff1a\u5716\u6848\u662f\u5426\u6e96\u3001\u8584\u819c\u6709\u6c92\u6709\u5167\u61c9\u529b\u3001\u8755\u523b\u7684\u5074\u58c1\u5920\u4e0d\u5920\u5e73\u76f4\u3001\u8154\u9ad4\u7684\u58d3\u529b\u7a69\u4e0d\u7a69\u5b9a\uff0c\u6700\u5f8c\u90fd\u6703\u53cd\u6620\u5728\u9748\u654f\u5ea6\u3001\u566a\u8072\u8207\u58fd\u547d\u4e0a\u3002\u4e0b\u6b21\u624b\u6a5f\u81ea\u52d5\u65cb\u8f49\u756b\u9762\u3001\u8eca\u4e0a\u5b89\u5168\u6c23\u56ca\u5373\u6642\u53cd\u61c9\u3001\u624b\u9336\u91cf\u5230\u6d77\u62d4\u8b8a\u5316\u6642\uff0c\u4e0d\u59a8\u60f3\u8d77\u9019\u4e9b\u5728\u986f\u5fae\u93e1\u4e0b\u624d\u770b\u5f97\u6e05\u695a\u7684\u7d50\u69cb\u2014\u2014\u5b83\u5011\u8b93\u65e5\u5e38\u79d1\u6280\u771f\u6b63\u300c\u611f\u89ba\u5f97\u5230\u300d\u3002<\/p>\n\n\n\n<div style=\"height:var(--wp--preset--spacing--30)\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<h5 class=\"wp-block-heading has-text-align-center\" id=\"\u60f3\u4e86\u89e3\u6709\u95dc\u7ba1\u87ba\u7d0b\u3001\u76f4\u87ba\u7d0b\u3001\u9310\u87ba\u7d0b\u3001\u5c3a\u5bf8\u8868\u793a\u3001\u82f1\u5236\u7ba1\u87ba\u7d0b\u3001\u516c\u5236\u7ba1\u87ba\u7d0b\u7684\u77e5\u8b58\u55ce\uff1f-\u5ef6\u4f38\u95b1\u8b80\uff1a\u300a\u7ba1\u87ba\u7d0b\u767e\u767e\u7a2e-\u4f60\u90fd\u8a8d\u8b58\u55ce-\u300b\">\u60f3\u4e86\u89e3\u6709\u95dcIC\u5c01\u88dd\u3001\u5148\u9032\u5c01\u88dd\u3001CoWos\u7684\u77e5\u8b58\u55ce\uff1f <br>Further Reading :<a href=\"https:\/\/www.taichungbro.com\/en\/2023\/10\/28\/semiconductor-packaging\/\" data-type=\"link\" data-id=\"https:\/\/taichungbro.com\/2023\/10\/28\/screw\/\">\u300aAdvancements in packaging technology\u300b<\/a><\/h5>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<div style=\"height:11px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>\u5f9e\u77fd\u6676\u5713\u5230\u611f\u6e2c\u5668\u5b8c\u6574\u89e3\u6790 MEMS \u88fd\u9020\u6d41\u7a0b\uff1a\u5fae\u5f71\u3001\u8584\u819c\u6c89\u7a4d\u3001DRIE \u6df1\u8755\u523b\u3001\u967d\u6975\u9375\u5408\u3001\u771f\u7a7a\u5c01\u88dd\u8207\u6821\u6b63\u6e2c\u8a66\uff0c\u5165\u9580\u4e5f\u770b\u5f97\u61c2\u3002\u9032\u4e00\u6b65\u638c\u63e1\u88fd\u7a0b\u95dc\u9375\u3001\u826f\u7387\u98a8\u96aa\u8207\u8a2d\u8a08\u53d6\u6368\u3002<\/p>","protected":false},"author":2,"featured_media":3572,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[45],"tags":[390,83,391,393,392],"class_list":["post-3571","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industrial-knowledge","tag-mems","tag-83","tag-391","tag-393","tag-392"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts\/3571","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/comments?post=3571"}],"version-history":[{"count":2,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts\/3571\/revisions"}],"predecessor-version":[{"id":3574,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts\/3571\/revisions\/3574"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/media\/3572"}],"wp:attachment":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/media?parent=3571"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/categories?post=3571"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/tags?post=3571"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}