{"id":3584,"date":"2025-10-01T22:40:47","date_gmt":"2025-10-01T14:40:47","guid":{"rendered":"https:\/\/www.taichungbro.com\/?p=3584"},"modified":"2025-10-01T22:42:04","modified_gmt":"2025-10-01T14:42:04","slug":"plasma","status":"publish","type":"post","link":"https:\/\/www.taichungbro.com\/en\/2025\/10\/01\/plasma\/","title":{"rendered":"Low-temperature plasma (Plasma) technology for surface modification and sterilization"},"content":{"rendered":"<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<div class=\"wp-block-rank-math-toc-block\" id=\"rank-math-toc\"><h2>Table of Content<\/h2><nav><ul><li class=\"\"><a href=\"#\u4f4e\u6eab\u7b49\u96e2\u5b50\u9ad4\u7684\u7269\u7406\u57fa\u790e\">The physical basis of low-temperature plasma<\/a><\/li><li class=\"\"><a href=\"#\u8868\u9762\u6539\u8cea\u7684\u6a5f\u5236\u8207\u61c9\u7528\">Mechanisms and applications of surface modification<\/a><\/li><li class=\"\"><a href=\"#\u4f4e\u6eab\u7b49\u96e2\u5b50\u9ad4\u7684\u6bba\u83cc\u6548\u80fd\">The sterilization efficiency of low-temperature plasma<\/a><\/li><li class=\"\"><a href=\"#\u5de5\u85dd\u53c3\u6578\u8207\u7522\u696d\u5dee\u7570\">Process parameters and industry differences<\/a><\/li><li class=\"\"><a href=\"#\u7d50\u8a9e\">Conclusion<\/a><\/li><\/ul><\/nav><\/div>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<p class=\"wp-block-paragraph\">In modern industry, the properties of material surfaces are often more critical than the materials themselves. Whether it&#039;s photoresist adhesion in semiconductor manufacturing or aseptic processing of medical devices, surface modification and sterilization technologies are core to improving product reliability. In recent years, low-temperature plasma has gradually replaced traditional chemical treatment methods due to its high activity, low energy consumption, and lack of chemical residue. Compared to plasma released by high-energy astronomical phenomena such as geomagnetic storms, industrial low-temperature plasma is generated under controllable conditions, allowing for precise adjustment of energy output and achieving modification or sterilization effects on specific materials. This article will delve into the physical principles and process parameters of low-temperature plasma, as well as its applications in industrial surface treatment and sterilization.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u4f4e\u6eab\u7b49\u96e2\u5b50\u9ad4\u7684\u7269\u7406\u57fa\u790e\">The physical basis of low-temperature plasma<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Plasma is an &quot;ionized gas&quot; composed of electrons, ions, neutral particles, and photons. When a gas is partially ionized under an applied electric field or a high-frequency electric field, it enters the plasma state. In low-temperature plasma, the overall gas temperature remains close to room temperature, but the free electrons possess extremely high energy, effectively triggering chemical reactions. This is why it is suitable for fragile materials such as polymers or biological tissues.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">In the theoretical model, the plasma ionization degree can be estimated using the Saha equation:<\/p>\n\n\n\n<script src=\"https:\/\/cdn.jsdelivr.net\/npm\/mathjax@3\/es5\/tex-mml-chtml.js\"><\/script>\n\n$$ \\frac{n_e n_i}{n_0} = \\frac{2}{\\Lambda^3} \\exp\\left( -\\frac{E_i}{kT_e} \\right) $$\n\n\n\n\n\n<p class=\"wp-block-paragraph\">Where ne is the electron density, ni is the ion density, n0 is the neutral particle density, \u039b is the de Broglie wavelength, Ei is the ionization energy, and Te is the electron temperature. As can be seen from the equation, the relationship between electron temperature and ionization energy directly determines the plasma generation efficiency. This characteristic allows the reaction intensity of low-temperature plasmas to be controlled by adjusting the electric field frequency, gas type, and pressure.<\/p>\n\n\n\n<div style=\"height:var(--wp--preset--spacing--30)\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<h5 class=\"wp-block-heading has-text-align-center\" id=\"\u60f3\u4e86\u89e3\u6709\u95dc\u7ba1\u87ba\u7d0b\u3001\u76f4\u87ba\u7d0b\u3001\u9310\u87ba\u7d0b\u3001\u5c3a\u5bf8\u8868\u793a\u3001\u82f1\u5236\u7ba1\u87ba\u7d0b\u3001\u516c\u5236\u7ba1\u87ba\u7d0b\u7684\u77e5\u8b58\u55ce\uff1f-\u5ef6\u4f38\u95b1\u8b80\uff1a\u300a\u7ba1\u87ba\u7d0b\u767e\u767e\u7a2e-\u4f60\u90fd\u8a8d\u8b58\u55ce-\u300b\">Want to learn about MEMS, silicon wafers, ion etching, anodic bonding, and microelectromechanical packaging? <br>Further Reading :<a href=\"https:\/\/www.taichungbro.com\/en\/2025\/09\/22\/mems\/\" data-type=\"link\" data-id=\"https:\/\/taichungbro.com\/2023\/10\/28\/screw\/\">MEMS Manufacturing Process Analysis: From Silicon Wafer to Sensor<\/a><\/h5>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<div style=\"height:11px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u8868\u9762\u6539\u8cea\u7684\u6a5f\u5236\u8207\u61c9\u7528\">Mechanisms and applications of surface modification<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">The goal of surface modification is to alter the physical or chemical properties of a material&#039;s surface without affecting its bulk structure. Low-temperature plasma can break chemical bonds on the material&#039;s surface and introduce new functional groups through high-energy electrons and active free radicals. For example, after treating the surface of polyethylene with oxygen plasma, carboxyl and hydroxyl groups are formed, transforming the originally hydrophobic material into a hydrophilic one.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">In the semiconductor industry, low-temperature plasma is widely used for photoresist removal and etching. For example, fluorinated gas plasma can selectively etch silicon oxide without damaging the underlying silicon substrate. Furthermore, nitrogen or argon plasma can remove organic residues from the process, ensuring the accuracy of circuit patterns. These applications significantly reduce the environmental pollution and corrosion risks associated with wet etching.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u4f4e\u6eab\u7b49\u96e2\u5b50\u9ad4\u7684\u6bba\u83cc\u6548\u80fd\">The sterilization efficiency of low-temperature plasma<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Traditional sterilization methods mostly rely on high-temperature steam, ultraviolet light, or chemical disinfectants. These methods are either energy-intensive or pose a significant risk of residue buildup. Low-temperature plasma, on the other hand, uses the combined effects of free radicals (such as O\u2022 and OH\u2022), ozone (O\u2083), and ultraviolet radiation to destroy cell walls and DNA structures, achieving rapid sterilization.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Research data shows that under atmospheric pressure and low-temperature plasma, bacterial survival rates can be reduced by more than six orders of magnitude (log reduction) in just tens of seconds. In medical device processing, low-temperature plasma is used to replace ethylene oxide sterilization, avoiding its high toxicity and lengthy degassing process. The food industry also utilizes this technology to extend shelf life, for example, by surface sterilizing fresh fruits and vegetables or packaging films, which can inhibit the growth of mold and E. coli.<\/p>\n\n\n\n<div style=\"height:var(--wp--preset--spacing--30)\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<h5 class=\"wp-block-heading has-text-align-center\" id=\"\u60f3\u4e86\u89e3\u6709\u95dc\u7ba1\u87ba\u7d0b\u3001\u76f4\u87ba\u7d0b\u3001\u9310\u87ba\u7d0b\u3001\u5c3a\u5bf8\u8868\u793a\u3001\u82f1\u5236\u7ba1\u87ba\u7d0b\u3001\u516c\u5236\u7ba1\u87ba\u7d0b\u7684\u77e5\u8b58\u55ce\uff1f-\u5ef6\u4f38\u95b1\u8b80\uff1a\u300a\u7ba1\u87ba\u7d0b\u767e\u767e\u7a2e-\u4f60\u90fd\u8a8d\u8b58\u55ce-\u300b\">Want to learn about linear motors, servo motors, positioning accuracy, optical scales, and ball screws? <br>Further Reading:<a href=\"https:\/\/www.taichungbro.com\/en\/2025\/08\/27\/motor\/\">Linear Motors vs. Servo Motors \u2013 5 Key Selection Guides<\/a>\u300b<\/h5>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<div style=\"height:11px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u5de5\u85dd\u53c3\u6578\u8207\u7522\u696d\u5dee\u7570\">Process parameters and industry differences<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Low-temperature plasma can be generated through methods including radio frequency discharge, microwave discharge, and dielectric barrier discharge (DBD). Different methods affect the plasma density and energy distribution, thus determining the treatment effect. For example:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>Gas types<\/strong>Oxygen is suitable for surface hydrophilization, fluorinated gases are suitable for etching, and nitrogen can improve the stability of grafting reactions on material surfaces.<\/li>\n\n\n\n<li><strong>pressure<\/strong>Low-pressure plasma (0.1\u201310 Pa) is mostly used for semiconductor etching; atmospheric pressure plasma is suitable for large-area surface treatment.<\/li>\n\n\n\n<li><strong>power<\/strong>High power can increase the concentration of active particles, but it also increases the risk of material damage. Therefore, a balance must be struck between performance and protection.<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Different industries have significantly different requirements for parameters. The semiconductor industry emphasizes fine etching and residue removal; the medical field focuses on sterilization efficiency and gentle processing; while the textile and packaging industries focus on improving the adhesion and printability of materials.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u7d50\u8a9e\">Conclusion<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Low-temperature plasma technology combines physical and chemical effects to provide an environmentally friendly, efficient, and precise solution for surface modification and sterilization. Compared to high-energy plasma phenomena such as natural geomagnetic storms, industrial low-temperature plasma can operate under safe and controlled conditions, achieving desired effects on specific materials. With the increasing demands for high cleanliness and reliability in the semiconductor, medical, and food industries, the application of low-temperature plasma will continue to expand. In the future, with advancements in power control technology and gas engineering, its processing range and efficiency will be further improved, gradually making it one of the core surface engineering technologies in manufacturing.<\/p>","protected":false},"excerpt":{"rendered":"<p>\u5728\u73fe\u4ee3\u5de5\u696d\u4e2d\uff0c\u6750\u6599\u8868\u9762\u7684\u7279\u6027\u5f80\u5f80\u6bd4\u6750\u6599\u672c\u8eab\u66f4\u70ba\u95dc\u9375\u3002\u7121\u8ad6\u662f\u534a\u5c0e\u9ad4\u88fd\u9020\u4e2d\u7684\u5149\u523b\u81a0\u9644\u8457\uff0c\u9084\u662f\u91ab\u7642\u5668\u6750\u7684\u7121\u83cc\u8655\u7406\uff0c\u8868 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":3585,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[45],"tags":[401,122,400],"class_list":["post-3584","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industrial-knowledge","tag-401","tag-122","tag-400"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts\/3584","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/comments?post=3584"}],"version-history":[{"count":3,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts\/3584\/revisions"}],"predecessor-version":[{"id":3588,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts\/3584\/revisions\/3588"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/media\/3585"}],"wp:attachment":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/media?parent=3584"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/categories?post=3584"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/tags?post=3584"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}