{"id":3881,"date":"2026-11-10T21:53:13","date_gmt":"2026-11-10T13:53:13","guid":{"rendered":"https:\/\/www.taichungbro.com\/2026\/11\/10\/high-na-euv-numerical-aperture-semiconductor\/"},"modified":"2026-11-10T21:53:13","modified_gmt":"2026-11-10T13:53:13","slug":"high-na-euv-numerical-aperture-semiconductor","status":"publish","type":"post","link":"https:\/\/www.taichungbro.com\/en\/2026\/11\/10\/high-na-euv-numerical-aperture-semiconductor\/","title":{"rendered":"What is NA numerical aperture? A key analysis of lithography and advanced processes from the optical diffraction limit to High-NA EUV."},"content":{"rendered":"<p>NA\uff08Numerical Aperture\uff0c\u6578\u503c\u5b54\u5f91\uff09\u662f\u5fae\u5f71\u5149\u5b78\u7cfb\u7d71\u6536\u96c6\u8207\u805a\u7126\u5149\u7dda\u80fd\u529b\u7684\u7121\u56e0\u6b21\u7269\u7406\u91cf\uff0c\u76f4\u63a5\u6c7a\u5b9a\u6676\u5713\u4e0a\u80fd\u8755\u523b\u51fa\u7684\u6700\u5c0f\u7dda\u5bec\u6975\u9650\u3002\u5728\u6975\u7d2b\u5916\u5149\uff08Extreme Ultraviolet\uff0cEUV\uff09\u5149\u6e90\u6ce2\u9577\u56fa\u5b9a\u65bc 13.5 nm \u7684\u7269\u7406\u73fe\u5be6\u4e0b\uff0c\u63d0\u5347\u6578\u503c\u5b54\u5f91\u662f\u534a\u5c0e\u9ad4\u88fd\u7a0b\u8de8\u8d8a 3nm\/2nm\u3001\u9081\u5411 A16\uff081.6 nm\uff09\u3001A14 \u4e43\u81f3\u57c3\u7c73\uff08Angstrom\uff09\u4e16\u4ee3\u6700\u6838\u5fc3\u7684\u5fae\u7e2e\u7a81\u7834\u53e3\u3002<\/p>\n<p>\u7136\u800c\uff0c\u5149\u5b78\u5b54\u5f91\u5f9e\u6a19\u6e96 EUV \u7684 0.33 \u8e8d\u5347\u81f3 High-NA \u7684 0.55\uff0c\u4e26\u975e\u55ae\u7d14\u66f4\u63db\u5927\u578b\u93e1\u7247\u3002\u7269\u7406\u898f\u5f8b\u5e36\u4f86\u4e86\u56b4\u82db\u7684\u5de5\u7a0b\u4ee3\u50f9\uff1a\u7126\u6df1\uff08Depth of Focus\uff0cDOF\uff09\u4ee5\u5b54\u5f91\u5e73\u65b9\u53cd\u6bd4\u5287\u70c8\u92b3\u6e1b\u81f3 10\uff5e15 nm \u7b49\u7d1a\uff0c\u5165\u5c04\u89d2\u904e\u5927\u5f15\u767c\u7684\u5149\u7f69 3D \u906e\u853d\u6548\u61c9\u66f4\u8feb\u4f7f ASML \u8207\u8521\u53f8\uff08Carl Zeiss\uff09\u6539\u63a1\u975e\u5c0d\u7a31\u7684\u300c\u8b8a\u5f62\u5149\u5b78\uff08Anamorphic Optics\uff09\u300d\uff0c\u76f4\u63a5\u5c07\u55ae\u6b21\u66dd\u5149\u8996\u5834\u780d\u534a\u81f3 26 mm \u00d7 16.5 mm\uff0c\u5f15\u7206\u5de8\u578b AI \u6676\u7247\u7684\u5149\u7f69\u62fc\u63a5\uff08Stitching\uff09\u8207\u55ae\u53f0\u9ad8\u9054 3.8 \u5104\u6b50\u5143\u7684\u91cf\u7522\u6210\u672c\u8003\u9a57\u3002<\/p>\n<p>\u672c\u6587\u62c6\u89e3\u745e\u5229\u6e96\u5247\u7684\u4e09\u5927\u5fae\u5f71\u8b8a\u6578\uff0c\u63d0\u4f9b DUV\u30010.33 EUV\u30010.55 High-NA \u5230\u672a\u4f86 Hyper-NA \u7684\u5b8c\u6574\u898f\u683c\u5c0d\u7167\u8868\uff0c\u4e26\u6df1\u5165\u89e3\u6790\u7126\u6df1\u6975\u9650\u3001\u8b8a\u5f62\u5149\u5b78\u6210\u56e0\u3001\u534a\u66dd\u5149\u5834\u62fc\u63a5\u74f6\u9838\uff0c\u4ee5\u53ca\u5148\u9032\u88fd\u7a0b\u6676\u5713\u5ee0\u5728\u7269\u7406\u5fae\u7e2e\u8207\u91cf\u7522\u6210\u672c\u4e4b\u9593\u7684\u95dc\u9375\u6c7a\u7b56\u9ede\u3002<\/p>\n<nav class=\"article-toc\" aria-labelledby=\"article-toc-heading\" style=\"margin-block: 1.5em;\">\n<h2 id=\"article-toc-heading\" style=\"scroll-margin-top: 110px;\">Table of Contents<\/h2>\n<ol>\n<li><a href=\"#rayleigh-criterion-lithography\" style=\"color: #00c8d7; text-decoration: underline;\">\u5149\u5b78\u6975\u9650\u5982\u4f55\u6c7a\u5b9a\u6676\u7247\u7dda\u5bec\uff1f\u7528\u745e\u5229\u6e96\u5247\u770b\u61c2\u5fae\u5f71\u4e09\u5927\u8b8a\u6578<\/a><\/li>\n<li><a href=\"#lithography-specifications-comparison\" style=\"color: #00c8d7; text-decoration: underline;\">DUV \u5230 High-NA EUV \u898f\u683c\u5c0d\u7167\u8868\uff1a0.33 \u8207 0.55 \u7684\u95dc\u9375\u9d3b\u6e9d<\/a><\/li>\n<li><a href=\"#dof-anamorphic-optics-tradeoff\" style=\"color: #00c8d7; text-decoration: underline;\">\u5149\u5b78\u5b54\u5f91\u8b8a\u5927\u6709\u4ec0\u9ebc\u4ee3\u50f9\uff1f\u7126\u6df1\u92b3\u6e1b\u8207\u8b8a\u5f62\u5149\u5b78\u7684\u7269\u7406\u8003\u9a57<\/a><\/li>\n<li><a href=\"#half-field-mask-stitching-challenges\" style=\"color: #00c8d7; text-decoration: underline;\">\u5927\u6676\u7247\u600e\u9ebc\u66dd\u5149\uff1f\u534a\u66dd\u5149\u8996\u5834\u8207\u5149\u7f69\u62fc\u63a5\uff08Stitching\uff09\u6280\u8853\u74f6\u9838<\/a><\/li>\n<li><a href=\"#advanced-nodes-cost-physics-balance\" style=\"color: #00c8d7; text-decoration: underline;\">\u5148\u9032\u88fd\u7a0b\u5728\u7269\u7406\u6975\u9650\u8207\u91cf\u7522\u6210\u672c\u4e4b\u9593\u7684\u5e73\u8861\u9ede<\/a><\/li>\n<\/ol>\n<\/nav>\n<h2 id=\"rayleigh-criterion-lithography\" style=\"scroll-margin-top: 110px;\">\u5149\u5b78\u6975\u9650\u5982\u4f55\u6c7a\u5b9a\u6676\u7247\u7dda\u5bec\uff1f\u7528\u745e\u5229\u6e96\u5247\u770b\u61c2\u5fae\u5f71\u4e09\u5927\u8b8a\u6578<\/h2>\n<p>\u5fae\u5f71\u88fd\u7a0b\u7684\u672c\u8cea\uff0c\u662f\u5c07\u5149\u7f69\u4e0a\u7684\u96fb\u8def\u5716\u6848\u900f\u904e\u5149\u5b78\u900f\u93e1\u6216\u53cd\u5c04\u93e1\u7d44\u7e2e\u5c0f\u6295\u5c04\u5230\u5857\u5e03\u5149\u963b\uff08Photoresist\uff09\u7684\u77fd\u6676\u5713\u8868\u9762\u3002\u6c7a\u5b9a\u7cfb\u7d71\u80fd\u89e3\u6790\u591a\u7d30\u5fae\u7dda\u689d\u7684\u7269\u7406\u57fa\u790e\uff0c\u4f86\u81ea\u5149\u5b78\u540d\u5e2b\u6069\u65af\u7279\u00b7\u963f\u8c9d\uff08Ernst Abbe\uff09\u8207\u745e\u5229\u52f3\u7235\uff08Lord Rayleigh\uff09\u5960\u5b9a\u7684\u300c\u745e\u5229\u6e96\u5247\uff08Rayleigh Criterion\uff09\u300d\uff1a<\/p>\n<p><strong>R = k\u2081 \u00d7 (\u03bb \/ NA)<\/strong><\/p>\n<p>\u516c\u5f0f\u4e2d\u6bcf\u500b\u7b26\u865f\u5404\u81ea\u4ee3\u8868\u534a\u5c0e\u9ad4\u88fd\u7a0b\u6f14\u9032\u4e2d\u7684\u6838\u5fc3\u5de5\u7a0b\u63a7\u5236\u9ede\uff1a<\/p>\n<ol>\n<li><strong>R\uff08Resolution\uff0c\u89e3\u6790\u5ea6\uff0f\u6700\u5c0f\u534a\u7bc0\u8ddd Half-Pitch\uff09<\/strong>\uff1a\u5149\u5b78\u7cfb\u7d71\u80fd\u6e05\u6670\u5206\u8fa8\u7684\u5169\u689d\u76f8\u9130\u7dda\u689d\u6700\u5c0f\u9593\u8ddd\u3002R \u8d8a\u5c0f\uff0c\u4ee3\u8868\u6676\u7247\u80fd\u5728\u76f8\u540c\u9762\u7a4d\u5167\u585e\u5165\u66f4\u591a\u96fb\u6676\u9ad4\u908f\u8f2f\u9598\u8207\u91d1\u5c6c\u5c0e\u7dda\u3002<\/li>\n<li><strong>\u03bb\uff08Lambda\uff0c\u66dd\u5149\u5149\u6e90\u6ce2\u9577\uff09<\/strong>\uff1a\u904e\u53bb\u56db\u5341\u5e74\u534a\u5c0e\u9ad4\u4e3b\u8981\u4f9d\u8cf4\u300c\u7e2e\u77ed\u5149\u6e90\u6ce2\u9577\u300d\u63a8\u52d5\u6469\u723e\u5b9a\u5f8b\u3002\u5f9e\u9ad8\u58d3\u6c5e\u71c8\u7684 g-line\uff08436 nm\uff09\u3001i-line\uff08365 nm\uff09\uff0c\u63a8\u9032\u81f3\u6e96\u5206\u5b50\u96f7\u5c04\u7684 KrF\uff08248 nm\uff09\u3001ArF\uff08193 nm\uff09\uff0c\u518d\u900f\u904e\u9ad8\u6298\u5c04\u7387\u7d14\u6c34\u5c07\u7b49\u6548\u6ce2\u9577\u58d3\u81f3 134 nm\uff08\u6d78\u6f64\u5f0f DUV\uff09\u30022018 \u5e74\u91cf\u7522\u7684\u6a19\u6e96 EUV \u5247\u8df3\u8e8d\u81f3 13.5 nm\u3002\u7136\u800c\uff0c\u5728 13.5 nm \u4e4b\u4e0b\uff0c\u7269\u7406\u754c\u81f3\u4eca\u627e\u4e0d\u5230\u66f4\u9ad8\u80fd\u91cf\u4e14\u517c\u5177\u9ad8\u767c\u5149\u529f\u7387\u8207\u5be6\u7528\u591a\u5c64\u819c\u53cd\u5c04\u7387\u7684\u5149\u5b78\u7cfb\u7d71\uff08\u8edf X \u5c04\u7dda\u7f3a\u4e4f\u9ad8\u6548\u53cd\u5c04\u93e1\u6750\u6599\uff09\uff0c\u56e0\u6b64\u5149\u6e90\u6ce2\u9577\u5df2\u88ab\u9396\u6b7b\u5728 13.5 nm\u3002<\/li>\n<li><strong>k\u2081\uff08\u88fd\u7a0b\u56e0\u5b50 Process Factor\uff09<\/strong>\uff1a\u4ee3\u8868\u5149\u963b\u6750\u6599\u5316\u5b78\u3001\u7167\u660e\u5149\u6e90\u512a\u5316\u3001\u5149\u5b78\u9130\u8fd1\u6548\u61c9\u4fee\u6b63\uff08Optical Proximity Correction\uff0cOPC\uff09\u4ee5\u53ca\u76f8\u79fb\u5149\u7f69\uff08Phase-Shift Mask\uff0cPSM\uff09\u7b49\u6280\u8853\u80fd\u529b\u7684\u7d9c\u5408\u53c3\u6578\u3002\u5728\u55ae\u6b21\u66dd\u5149\u7684\u5149\u5b78\u7e5e\u5c04\u7269\u7406\u6975\u9650\u4e0b\uff0c\u7406\u8ad6\u4e0b\u9650\u70ba k\u2081 = 0.25\u3002\u76ee\u524d 0.33 NA EUV \u91cf\u7522\u7684 k\u2081 \u5df2\u7d93\u88ab\u58d3\u69a8\u5230 0.28\uff5e0.30 \u9644\u8fd1\uff0c\u5e7e\u7121\u518d\u964d\u7a7a\u9593\uff1b\u82e5\u8981\u5f37\u884c\u7a81\u7834\uff0c\u53ea\u80fd\u63a1\u7528\u81ea\u5c0d\u6e96\u591a\u91cd\u66dd\u5149\uff08Self-Aligned Multiple Patterning\uff0c\u5982 SAQP\uff09\uff0c\u4f46\u88fd\u7a0b\u6b65\u9a5f\u8207\u7f3a\u9677\u7387\u5c07\u5448\u5e7e\u4f55\u7d1a\u6578\u66b4\u589e\u3002<\/li>\n<li><strong>NA\uff08Numerical Aperture\uff0c\u6578\u503c\u5b54\u5f91\uff09<\/strong>\uff1a\u5b9a\u7fa9\u70ba <strong>NA = n \u00d7 sin(\u03b8)<\/strong>\uff0c\u5176\u4e2d n \u70ba\u50b3\u64ad\u4ecb\u8cea\u7684\u6298\u5c04\u7387\uff08EUV \u8655\u65bc\u9ad8\u771f\u7a7a\u74b0\u5883\uff0cn = 1.0\uff09\uff0c\u03b8 \u5247\u662f\u5149\u5b78\u93e1\u7d44\u6240\u80fd\u6536\u96c6\u4e26\u805a\u7126\u81f3\u6676\u5713\u7684\u6700\u5927\u534a\u5b54\u5f91\u89d2\uff08Half-Angle of Acceptance\uff09\u3002<\/li>\n<\/ol>\n<p>\u7576\u5149\u6e90\u6ce2\u9577 \u03bb \u56fa\u5b9a\u5728 13.5 nm\uff0c\u4e14\u88fd\u7a0b\u56e0\u5b50 k\u2081 \u903c\u8fd1\u7406\u8ad6\u4e0b\u9650 0.25 \u6642\uff0c\u5fae\u5f71\u8a2d\u5099\u8981\u9032\u4e00\u6b65\u7e2e\u6e1b\u7dda\u5bec R\uff0c<strong>\u552f\u4e00\u7684\u7d14\u5149\u5b78\u7269\u7406\u7a81\u7834\u53e3\u5c31\u662f\u653e\u5927 NA<\/strong>\u3002\u9019\u6b63\u662f\u5fae\u5f71\u8a2d\u5099\u9738\u4e3b ASML \u958b\u767c High-NA EUV\uff08\u5982 TWINSCAN EXE:5000 \u53ca EXE:5200 \u7cfb\u5217\uff09\u7684\u6838\u5fc3\u52d5\u529b\u3002<\/p>\n<p>\u5728\u898f\u5283\u7522\u7dda\u4f48\u5c40\u6642\uff0c\u6676\u5713\u5ee0\u4e26\u975e\u6240\u6709\u5c64\u5225\u90fd\u76f2\u76ee\u8ffd\u6c42\u6700\u65b0\u5149\u5b78\u6a5f\u53f0\uff0c\u800c\u662f\u4f9d\u7dda\u5bec\u56b4\u82db\u5ea6\u5206\u5c64\u66dd\u5149\uff0c\u8a73\u7d30\u67b6\u69cb\u53ef\u53c3\u95b1<a href=\"https:\/\/www.taichungbro.com\/en\/2026\/06\/22\/advanced-vs-mature-process-applications\/\" style=\"color: #00c8d7; text-decoration: underline;\">Where are advanced and mature process technologies used? A comprehensive guide from AI chips and automotive MCUs to power devices.<\/a>\uff0c\u7406\u89e3\u95dc\u9375\u5c64\u8207\u975e\u95dc\u9375\u5c64\u7684\u8a2d\u5099\u642d\u914d\u7b56\u7565\u3002<\/p>\n<h2 id=\"lithography-specifications-comparison\" style=\"scroll-margin-top: 110px;\">DUV \u5230 High-NA EUV \u898f\u683c\u5c0d\u7167\u8868\uff1a0.33 \u8207 0.55 \u7684\u95dc\u9375\u9d3b\u6e9d<\/h2>\n<p>\u70ba\u4e86\u770b\u6e05\u5fae\u5f71\u6280\u8853\u6f14\u9032\u7684\u7269\u7406\u6975\u9650\u8207\u5de5\u7a0b\u5dee\u7570\uff0c\u4e0b\u8868\u5f59\u6574\u5f9e\u4e3b\u6d41\u6df1\u7d2b\u5916\u5149\uff08DUV\uff09\u3001\u6a19\u6e96 EUV\u3001High-NA EUV \u5230\u4e0b\u4e00\u4ee3 Hyper-NA \u7684\u95dc\u9375\u898f\u683c\u53c3\u6578\uff1a<\/p>\n<figure class=\"wp-block-table\" style=\"overflow-x: auto;\">\n<table>\n<thead>\n<tr>\n<th>\u5fae\u5f71\u4e16\u4ee3\u8207\u6a5f\u578b<\/th>\n<th>\u5149\u6e90\u6ce2\u9577\u8207\u6578\u503c\u5b54\u5f91<\/th>\n<th>\u55ae\u6b21\u66dd\u5149\u6975\u9650\u7dda\u5bec (R)<\/th>\n<th>\u7126\u6df1\u88d5\u5ea6 (DOF)<\/th>\n<th>\u5149\u5b78\u8207\u5149\u7f69\u7cfb\u7d71\u67b6\u69cb<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6d78\u6f64\u5f0f DUV (\u5982 NXT:2050i)<\/td>\n<td>193 nm (\u7d14\u6c34 n=1.44), NA 1.35<\/td>\n<td>~38 nm (\u55ae\u6b21\u66dd\u5149\u6975\u9650)<\/td>\n<td>~100\u2013150 nm<\/td>\n<td>\u5c48\u5149\u5f0f\u900f\u93e1\u7d44\u30014x \u7a7f\u900f\u5f0f\u77f3\u82f1\u5149\u7f69\u3001\u6a19\u6e96\u5168\u8996\u5834 (26\u00d733 mm)<\/td>\n<\/tr>\n<tr>\n<td>\u6a19\u6e96 EUV (\u5982 NXE:3600D\/3800E)<\/td>\n<td>13.5 nm (\u771f\u7a7a n=1.0), NA 0.33<\/td>\n<td>~13 nm (\u652f\u63f4 3nm\/2nm \u95dc\u9375\u5c64)<\/td>\n<td>~30\u201340 nm<\/td>\n<td>\u8521\u53f8\u5168\u53cd\u5c04\u5f0f\u926c\u77fd\u93e1\u7d44\u30014x \u53cd\u5c04\u5f0f\u5149\u7f69\u3001\u6a19\u6e96\u5168\u8996\u5834 (26\u00d733 mm)<\/td>\n<\/tr>\n<tr>\n<td>High-NA EUV (EXE:5000\/5200)<\/td>\n<td>13.5 nm (\u771f\u7a7a n=1.0), NA 0.55<\/td>\n<td>~8 nm (\u652f\u63f4 2nm\/A16\/A14)<\/td>\n<td>~10\u201315 nm (\u7e2e\u5c0f\u8d85\u904e 60%)<\/td>\n<td>\u8521\u53f8\u8b8a\u5f62\u5149\u5b78\u93e1\u7d44 (X:4x, Y:8x)\u3001\u534a\u66dd\u5149\u8996\u5834 (26\u00d716.5 mm)<\/td>\n<\/tr>\n<tr>\n<td>Hyper-NA EUV (\u7814\u767c\u8a55\u4f30\u4e2d)<\/td>\n<td>13.5 nm (\u771f\u7a7a n=1.0), NA 0.75+<\/td>\n<td>&lt; 5 nm (\u6b21\u57c3\u7c73\u7d1a\u7814\u7a76)<\/td>\n<td>&lt; 5 nm (\u903c\u8fd1\u539f\u5b50\u5e73\u6574\u5ea6)<\/td>\n<td>\u8d85\u5927\u5b54\u5f91\u975e\u7403\u9762\u93e1\u3001\u504f\u632f\u5149\u88dc\u511f\u3001\u9700\u9769\u547d\u6027\u5149\u963b\u8207\u8f09\u53f0\u5e73\u6574\u5ea6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/figure>\n<p>\u5f9e\u8868\u4e2d\u898f\u683c\u53ef\u770b\u51fa\uff0cNA \u5f9e 0.33 \u63d0\u5347\u81f3 0.55\uff0c\u55ae\u6b21\u66dd\u5149\u6975\u9650\u7dda\u5bec\u76f4\u63a5\u5f9e 13 nm \u58d3\u4f4e\u81f3 8 nm\uff0c\u9019\u4ee3\u8868\u539f\u672c\u5728 0.33 NA \u4e0b\u5fc5\u9808\u9032\u884c\u96d9\u91cd\u66dd\u5149\uff08EUV Double Patterning\uff09\u7684\u8d85\u5bc6\u96c6\u91d1\u5c6c\u4e92\u9023\u5c64\uff0c\u5728 High-NA \u4e0b\u80fd\u6062\u5fa9\u55ae\u6b21\u66dd\u5149\u5b8c\u6210\uff0c\u986f\u8457\u6d88\u9664\u5957\u523b\u8aa4\u5dee\uff08Overlay Error\uff09\u4e26\u7701\u4e0b\u7e41\u8907\u7684\u5149\u7f69\u5faa\u74b0\u3002<\/p>\n<p>\u7136\u800c\uff0c\u9019\u5f35\u8868\u6700\u81f4\u547d\u7684\u5de5\u7a0b\u8b66\u8a0a\u5728\u65bc\u7126\u6df1\u88d5\u5ea6\uff08DOF\uff09\u6b04\u4f4d\uff1aHigh-NA \u7684\u7126\u6df1\u76f4\u63a5\u66b4\u8dcc\u81f3 10\uff5e15 nm\u3002\u9019\u610f\u5473\u8457\u6676\u5713\u8868\u9762\u54ea\u6015\u53ea\u6709\u6578\u500b\u5948\u7c73\u7684\u5fae\u89c0\u8d77\u4f0f\u6216\u71b1\u8139\u51b7\u7e2e\uff0c\u5c31\u6703\u76f4\u63a5\u812b\u96e2\u6210\u50cf\u7126\u9ede\uff0c\u9020\u6210\u5716\u6848\u6a21\u7cca\u6216\u56b4\u91cd\u7f3a\u9677\u3002<\/p>\n<h2 id=\"dof-anamorphic-optics-tradeoff\" style=\"scroll-margin-top: 110px;\">\u5149\u5b78\u5b54\u5f91\u8b8a\u5927\u6709\u4ec0\u9ebc\u4ee3\u50f9\uff1f\u7126\u6df1\u92b3\u6e1b\u8207\u8b8a\u5f62\u5149\u5b78\u7684\u7269\u7406\u8003\u9a57<\/h2>\n<p>\u5149\u5b78\u8a2d\u8a08\u5f9e\u4f86\u6c92\u6709\u514d\u8cbb\u7684\u5348\u9910\u3002\u7576\u5149\u5b78\u5de5\u7a0b\u5e2b\u900f\u904e\u653e\u5927\u5165\u5c04\u534a\u89d2 \u03b8 \u5c07 NA \u5f9e 0.33 \u62c9\u62ac\u5230 0.55 \u6642\uff0c\u5fae\u5f71\u8a2d\u5099\u7acb\u523b\u649e\u4e0a\u5169\u9053\u56b4\u9177\u7684\u7269\u7406\u9ad8\u7246\uff1a\u7126\u6df1\u5d29\u584c\u8207\u5149\u7f69 3D \u906e\u853d\u6548\u61c9\u3002<\/p>\n<h3>1. \u7126\u6df1\u7684\u5e73\u65b9\u53cd\u6bd4\u5d29\u584c<\/h3>\n<p>\u5fae\u5f71\u7cfb\u7d71\u7684\u7126\u6df1\uff08Depth of Focus\uff0cDOF\uff09\u4ee3\u8868\u5149\u5b78\u5f71\u50cf\u5728\u5149\u963b\u539a\u5ea6\u65b9\u5411\u4e0a\u7dad\u6301\u6e05\u6670\u5716\u6848\u7684\u53ef\u5bb9\u5fcd\u7e31\u5411\u6df1\u5ea6\uff0c\u5176\u7269\u7406\u95dc\u4fc2\u5f0f\u5982\u4e0b\uff1a<\/p>\n<p><strong>DOF = k\u2082 \u00d7 (\u03bb \/ NA\u00b2)<\/strong><\/p>\n<p>\u6ce8\u610f\u5169\u8005\u7684\u6bd4\u4f8b\u95dc\u4fc2\uff1a\u89e3\u6790\u5ea6 R \u50c5\u8207 NA \u5448\u300c\u4e00\u6b21\u53cd\u6bd4\u300d\uff0c\u4f46\u7126\u6df1 DOF \u537b\u8207 NA \u5448\u300c\u4e8c\u6b21\u5e73\u65b9\u53cd\u6bd4\u300d\uff01<\/p>\n<p>\u7576 NA \u7531 0.33 \u64f4\u5927\u5230 0.55\uff0c\u5b54\u5f91\u653e\u5927\u70ba 1.67 \u500d\uff0c\u4f46\u5176\u5e73\u65b9\u9805 NA\u00b2 \u66b4\u589e\u70ba\u7d04 2.78 \u500d\u3002\u8a08\u7b97\u7d50\u679c\u986f\u793a\uff0c\u7126\u6df1\u76f4\u63a5\u840e\u7e2e\u70ba\u539f\u672c\u7684 36%\uff0c\u5be6\u52d9\u6709\u6548\u7126\u6df1\u88d5\u5ea6\u50c5\u5269 10\uff5e15 nm\uff08\u76f8\u7576\u65bc\u5e7e\u5341\u9846\u77fd\u539f\u5b50\u7684\u76f4\u5f91\uff09\u3002<\/p>\n<p>\u7126\u6df1\u6975\u7a84\u5316\u5c0d\u6676\u5713\u88fd\u9020\u5e36\u4f86\u5168\u9762\u9023\u9396\u53cd\u61c9\uff1a<\/p>\n<ul>\n<li><strong>\u5149\u963b\u819c\u539a\u88ab\u8feb\u6975\u7aef\u6e1b\u8584<\/strong>\uff1a\u70ba\u4e86\u9632\u6b62\u66dd\u5149\u6642\u5149\u7dda\u5728\u5149\u963b\u9802\u90e8\u8207\u5e95\u90e8\u7522\u751f\u7126\u8ddd\u504f\u5dee\uff0c\u4e26\u907f\u514d\u986f\u5f71\u5f8c\u9ad8\u6df1\u5bec\u6bd4\u5716\u6848\u767c\u751f\u6bdb\u7d30\u529b\u5012\u584c\uff08Pattern Collapse\uff09\uff0c\u5149\u963b\u819c\u539a\u5fc5\u9808\u5f9e 35 nm \u5287\u964d\u5230 15\uff5e20 nm\u3002\u50b3\u7d71\u5316\u5b78\u653e\u5927\u5149\u963b\uff08CAR\uff09\u5728\u8d85\u8584\u819c\u539a\u4e0b\u9762\u81e8\u986f\u5f71\u5c0d\u6bd4\u5ea6\u4e0d\u8db3\u8207\u96a8\u6a5f\u7f3a\u9677\uff08Stochastic Defects\uff09\uff0c\u8feb\u4f7f\u6676\u5713\u5ee0\u52a0\u901f\u8a55\u4f30\u91d1\u5c6c\u6c27\u5316\u7269\u5149\u963b\uff08Metal Oxide Resist\uff0cMOx PR\uff09\u3002<\/li>\n<li><strong>\u5948\u7c73\u7d1a\u8f09\u53f0\u5e73\u6574\u5ea6\u8207\u71b1\u7ba1\u7406\u6311\u6230<\/strong>\uff1a\u66dd\u5149\u8f09\u53f0\u5728\u9ad8\u901f\u6383\u63cf\u6642\uff0c\u6676\u5713\u8868\u9762\u5e73\u6574\u5ea6\u3001\u5316\u5b78\u6a5f\u68b0\u7814\u78e8\uff08CMP\uff09\u5f8c\u7684\u5fae\u89c0\u6ce2\u7d0b\u3001\u4ee5\u53ca\u5149\u963b\u53d7\u9ad8\u80fd\u91cf EUV \u7167\u5c04\u7522\u751f\u7684\u5c40\u90e8\u71b1\u8b8a\u5f62\uff0c\u90fd\u5fc5\u9808\u88ab\u56b4\u683c\u7b9d\u5236\u5728\u5948\u7c73\u7d1a\u4ee5\u5167\u3002\u9019\u9805\u5e73\u6574\u5ea6\u8981\u6c42\u8207\u5148\u9032\u5c01\u88dd\u8f09\u677f\u5728\u9ad8\u6eab\u4e0b\u5c0d\u6297\u7ff9\u66f2\u7684\u56b4\u82db\u908f\u8f2f\u5982\u51fa\u4e00\u8f4d\uff0c\u76f8\u95dc\u71b1\u61c9\u529b\u8207\u5e73\u6574\u5ea6\u6a5f\u7406\u53ef\u53c3\u8003<a href=\"https:\/\/www.taichungbro.com\/en\/2026\/07\/02\/glass-substrate-advanced-packaging\/\" style=\"color: #00c8d7; text-decoration: underline;\">What are the differences between glass substrates and ABF carriers? Analysis of the flatness and warpage challenges in the advanced packaging TGV process.<\/a>.<\/li>\n<\/ul>\n<h3>2. \u5149\u7f69 3D \u906e\u853d\u6548\u61c9\u903c\u51fa\u300c\u8b8a\u5f62\u5149\u5b78\u300d<\/h3>\n<p>\u5728\u6df1\u7d2b\u5916\u5149\uff08DUV\uff09\u900f\u93e1\u7cfb\u7d71\u4e2d\uff0c\u5149\u7dda\u662f\u5782\u76f4\u7a7f\u900f\u77f3\u82f1\u5149\u7f69\u7684\uff1b\u4f46\u6975\u7d2b\u5916\u5149\uff08EUV\uff09\u6975\u6613\u88ab\u7a7a\u6c23\u8207\u6240\u6709\u900f\u660e\u5149\u5b78\u73bb\u7483\u5438\u6536\uff0c\u56e0\u6b64\u5fae\u5f71\u7cfb\u7d71\u5167\u90e8\u5fc5\u9808\u5168\u771f\u7a7a\uff0c\u5149\u5b78\u5143\u4ef6\u8207\u5149\u7f69\u4e5f\u5168\u6578\u6539\u70ba\u300c\u53cd\u5c04\u5f0f\u926c\u77fd\u591a\u5c64\u819c\uff08Mo\/Si Multilayers\uff09\u300d\u3002<\/p>\n<p>\u70ba\u4e86\u8b93\u5165\u5c04\u5149\u8207\u53cd\u5c04\u5149\u5206\u958b\uff0cEUV \u4e3b\u5c04\u7dda\u5fc5\u9808\u4ee5\u5fae\u5c0f\u7684\u50be\u659c\u89d2\uff08\u5728 0.33 NA \u7cfb\u7d71\u4e2d\u7d04\u70ba 6 \u5ea6\uff09\u659c\u5411\u5c04\u5165\u5149\u7f69\u3002\u5149\u7f69\u8868\u9762\u6709\u5438\u5149\u6750\u6599\u69cb\u6210\u7684\u96fb\u8def\u5e7e\u4f55\u7d50\u69cb\u3002\u7576\u6676\u5713\u7aef NA \u653e\u5927\u5230 0.55 \u6642\uff0c\u5982\u679c\u5149\u7f69\u7aef\u4f9d\u820a\u7dad\u6301\u50b3\u7d71\u7684 4x \u7e2e\u653e\u500d\u7387\uff0c\u5149\u7f69\u7aef\u7684\u805a\u5149\u534a\u89d2\u6703\u904e\u5927\uff0c\u5c0e\u81f4\u5c04\u5165\u5149\u7f69\u5438\u6536\u5c64\u7684\u5149\u7dda\u89d2\u5ea6\u904e\u65bc\u50be\u659c\u3002<\/p>\n<p>\u6b64\u6642\u6703\u767c\u751f\u56b4\u91cd\u7684\u300c\u5149\u7f69 3D \u906e\u853d\u6548\u61c9\uff08Mask 3D Effects\uff0cM3D\uff09\u8207\u6697\u5f71\u6548\u61c9\uff08Shadowing Effect\uff09\u300d\uff1a\u50be\u659c\u7684\u5149\u7dda\u88ab\u9ad8\u8073\u7684\u5438\u5149\u5c64\u5074\u58c1\u64cb\u4f4f\uff0c\u5c0e\u81f4\u80cc\u5149\u9762\u7684\u5fae\u7d30\u7dda\u8def\u7121\u6cd5\u6b63\u5e38\u53cd\u5c04\u6210\u50cf\uff0c\u96fb\u8def\u5716\u6848\u7522\u751f\u56b4\u91cd\u5931\u771f\u8207\u975e\u5c0d\u7a31\u504f\u5dee\u3002<\/p>\n<p>\u70ba\u4e86\u89e3\u6c7a\u906e\u853d\u6548\u61c9\uff0c\u5149\u7f69\u7aef\u7684\u89d2\u5ea6\u5fc5\u9808\u8b8a\u5e73\u7de9\uff0c\u6700\u76f4\u63a5\u7684\u505a\u6cd5\u662f\u5c07\u653e\u5927\u500d\u7387\u5f9e 4x \u63d0\u9ad8\u81f3 8x\u3002\u7136\u800c\uff0c\u5982\u679c X \u8ef8\u8207 Y \u8ef8\u540c\u6642\u6539\u6210 8x \u7e2e\u653e\uff0c\u5728\u73fe\u6709\u6a19\u6e96 6 \u540b\u77f3\u82f1\u5149\u7f69\u5c3a\u5bf8\u4e0d\u8b8a\u7684\u524d\u63d0\u4e0b\uff0c\u55ae\u6b21\u6295\u5c04\u5230\u6676\u5713\u4e0a\u7684\u8996\u5834\u9762\u7a4d\u5c07\u7e2e\u5c0f\u70ba\u539f\u672c\u7684\u56db\u5206\u4e4b\u4e00\uff0826 mm \u00d7 8.25 mm\uff09\uff0c\u6676\u5713\u66dd\u5149\u7e3d\u6b21\u6578\u5c07\u66b4\u589e 4 \u500d\uff0c\u6a5f\u53f0\u6bcf\u5c0f\u6642\u6676\u5713\u7522\u51fa\u91cf\uff08WPH\uff09\u5c07\u76f4\u63a5\u8170\u65ac\u518d\u8170\u65ac\uff0c\u91cf\u7522\u6210\u672c\u5c07\u5b8c\u5168\u5931\u63a7\u3002<\/p>\n<p>\u8521\u53f8\u8207 ASML \u7684\u9769\u547d\u6027\u89e3\u7b54\u5c31\u662f<strong>\u8b8a\u5f62\u5149\u5b78\uff08Anamorphic Optics\uff09<\/strong>\uff1a<\/p>\n<ul>\n<li><strong>X \u8ef8\uff08\u5782\u76f4\u6383\u63cf\u65b9\u5411\uff09<\/strong>\uff1a\u7dad\u6301\u50b3\u7d71\u7684 <strong>4x \u7e2e\u653e<\/strong>.<\/li>\n<li><strong>Y \u8ef8\uff08\u6cbf\u8457\u6383\u63cf\u65b9\u5411\uff09<\/strong>\uff1a\u6539\u63a1 <strong>8x \u7e2e\u653e<\/strong>.<\/li>\n<\/ul>\n<p>\u900f\u904e\u63a1\u7528\u975e\u5c0d\u7a31\u66f2\u7387\u7684\u8b8a\u5f62\u53cd\u5c04\u93e1\u7d44\uff0c\u4e26\u8b93\u5149\u7f69\u53f0\u8207\u6676\u5713\u53f0\u5728 Y \u8ef8\u4ee5\u975e\u5c0d\u7a31\u7684 8:1 \u901f\u5ea6\u5dee\u540c\u6b65\u9ad8\u901f\u6383\u63cf\uff0c\u6210\u529f\u5728\u6d88\u9664\u5149\u7f69 3D \u906e\u853d\u6548\u61c9\u7684\u540c\u6642\uff0c\u5c07\u6676\u5713\u4e0a\u7684\u66dd\u5149\u5340\u57df\u4fdd\u5b58\u5728 <strong>26 mm \u00d7 16.5 mm \u7684\u300c\u534a\u66dd\u5149\u8996\u5834\uff08Half Field\uff09\u300d<\/strong>\uff0c\u907f\u514d\u7522\u80fd\u5fb9\u5e95\u5d29\u6f70\u3002<\/p>\n<h2 id=\"half-field-mask-stitching-challenges\" style=\"scroll-margin-top: 110px;\">\u5927\u6676\u7247\u600e\u9ebc\u66dd\u5149\uff1f\u534a\u66dd\u5149\u8996\u5834\u8207\u5149\u7f69\u62fc\u63a5\uff08Stitching\uff09\u6280\u8853\u74f6\u9838<\/h2>\n<p>\u8b8a\u5f62\u5149\u5b78\u4fdd\u4f4f\u4e86\u6676\u5713\u7522\u80fd\uff0c\u537b\u5728\u6676\u7247\u8a2d\u8a08\u7aef\u5f15\u7206\u4e86\u65b0\u7684\u7d50\u69cb\u5371\u6a5f\u3002<\/p>\n<p>\u5728\u50b3\u7d71 0.33 NA EUV \u8207 DUV \u6642\u4ee3\uff0c\u696d\u754c\u901a\u7528\u7684\u300c\u5168\u66dd\u5149\u8996\u5834\uff08Full Field\uff09\u300d\u5c3a\u5bf8\u70ba <strong>26 mm \u00d7 33 mm = 858 mm\u00b2<\/strong>\u3002\u904e\u53bb\u5341\u5e74\uff0c\u8cc7\u6599\u4e2d\u5fc3 AI \u4f3a\u670d\u5668\u6676\u7247\u8207\u9802\u7d1a GPU\uff08\u5982 NVIDIA Hopper\u3001Blackwell \u67b6\u69cb\u8207\u9ad8\u6548\u80fd\u904b\u7b97 XPU\uff09\u70ba\u4e86\u8ffd\u6c42\u6700\u5927\u7b97\u529b\uff0c\u55ae\u4e00\u6676\u7247\u9762\u7a4d\u5f80\u5f80\u903c\u8fd1 700\uff5e850 mm\u00b2 \u7684\u5fae\u5f71\u6975\u9650\uff08Reticle Limit\uff09\u3002<\/p>\n<p>\u800c\u5728 0.55 NA High-NA EUV \u4e0b\uff0c\u66dd\u5149\u8996\u5834\u88ab\u5f37\u5236\u780d\u534a\u81f3 <strong>26 mm \u00d7 16.5 mm = 429 mm\u00b2<\/strong>This means:<strong>\u4efb\u4f55\u9762\u7a4d\u5927\u65bc 429 mm\u00b2 \u7684\u5927\u578b\u55ae\u6676\u7c92\uff08Monolithic Die\uff09\uff0c\u90fd\u7121\u6cd5\u518d\u7528\u4e00\u5f35\u5149\u7f69\u3001\u55ae\u6b21\u66dd\u5149\u88fd\u4f5c\u51fa\u4f86\uff01<\/strong><\/p>\n<h3>\u5149\u7f69\u62fc\u63a5\uff08Stitching\uff09\u7684\u5948\u7c73\u7d1a\u5730\u7344<\/h3>\n<p>\u9762\u5c0d\u5927\u65bc\u534a\u8996\u5834\u7684\u5de8\u578b\u6676\u7247\uff0c\u6676\u7247\u88fd\u9020\u5546\u9762\u81e8\u5169\u7a2e\u6280\u8853\u9078\u64c7\uff1a\u9032\u884c\u5149\u7f69\u62fc\u63a5\uff08Mask Stitching\uff09\uff0c\u6216\u662f\u5168\u9762\u8f49\u5411\u5c0f\u6676\u7247\uff08Chiplet\uff09\u62c6\u5206\u3002<\/p>\n<p>\u82e5\u9078\u64c7\u5728\u540c\u4e00\u9846\u55ae\u6676\u7247\u4e0a\u9032\u884c\u5149\u7f69\u62fc\u63a5\uff0c\u6676\u5713\u5ee0\u5fc5\u9808\u5206\u5225\u88fd\u4f5c\u5169\u5f35\u4e0d\u540c\u7684\u5149\u7f69\uff08\u4f8b\u5982\u6676\u7247\u4e0a\u534a\u90e8\u8207\u4e0b\u534a\u90e8\uff09\uff0c\u5148\u66dd\u5149\u4e0a\u534a\u90e8\uff0c\u518d\u7cbe\u6e96\u79fb\u52d5\u6676\u5713\u66dd\u5149\u4e0b\u534a\u90e8\uff0c\u4e26\u5728\u5169\u8005\u7684\u91cd\u758a\u63a5\u7e2b\u5340\uff08Stitch Boundary\uff09\u5b8c\u6210\u7dda\u8def\u5c0d\u63a5\uff1a<\/p>\n<ol>\n<li><strong>\u5957\u523b\u91cd\u758a\u8aa4\u5dee\uff08Overlay Budget\uff09\u6975\u9650<\/strong>\uff1a\u5728 2nm \u53ca A16 \u4e16\u4ee3\uff0c\u5167\u90e8\u6700\u7dca\u6e4a\u7684\u91d1\u5c6c\u5c64\u7dda\u8ddd\u50c5\u6709\u5341\u9918\u5948\u7c73\u3002\u5169\u6b21\u7368\u7acb\u66dd\u5149\u5728\u7e2b\u5408\u4ea4\u754c\u8655\u7684\u5c0d\u6e96\u8aa4\u5dee\u5fc5\u9808\u56b4\u683c\u9650\u5236\u5728 1\uff5e2 nm \u4ee5\u5167\u3002\u54ea\u6015\u51fa\u73fe\u6975\u5fae\u5c0f\u7684\u6a5f\u68b0\u71b1\u6f02\u79fb\uff0c\u4ea4\u754c\u8655\u8de8\u5340\u9023\u63a5\u7684\u6578\u842c\u689d\u9ad8\u901f\u91d1\u5c6c\u5c0e\u7dda\u5c31\u6703\u7522\u751f\u65b7\u8def\u3001\u9ad8\u963b\u6297\u6216\u77ed\u8def\uff0c\u76f4\u63a5\u6467\u6bc0\u6574\u9846\u6676\u7247\u7684\u826f\u7387\u3002<\/li>\n<li><strong>\u8a2d\u8a08\u898f\u5247\u8207\u9762\u7a4d\u61f2\u7f70<\/strong>\uff1a\u6676\u7247\u8a2d\u8a08\u5718\u968a\uff08EDA \u8207\u96fb\u8def\u8a2d\u8a08\u5e2b\uff09\u4e0d\u80fd\u518d\u96a8\u610f\u8de8\u754c\u8d70\u7dda\uff0c\u5fc5\u9808\u5728\u62fc\u63a5\u908a\u754c\u8655\u7559\u51fa\u5bec\u95ca\u7684\u7981\u5236\u5340\uff08Keep-Out Zone\uff09\uff0c\u63a1\u7528\u66f4\u7c97\u7684\u5c0e\u7dda\u3001\u5197\u9918\u901a\u5b54\uff08Redundant Vias\uff09\u8207\u7279\u6b8a\u7684\u7de9\u885d\u908f\u8f2f\u55ae\u5143\uff0c\u9019\u4e0d\u50c5\u6703\u589e\u52a0\u6676\u7247\u8a2d\u8a08\u96e3\u5ea6\uff0c\u66f4\u6703\u4fb5\u8755\u5bf6\u8cb4\u7684\u77fd\u6676\u5713\u9762\u7a4d\u3002<\/li>\n<\/ol>\n<h3>\u5c0f\u6676\u7247\u67b6\u69cb\u8207\u5148\u9032\u5c01\u88dd\u7684\u5fc5\u7136\u5d1b\u8d77<\/h3>\n<p>\u6b63\u56e0\u70ba\u5149\u7f69\u62fc\u63a5\u7684\u91cf\u7522\u826f\u7387\u6975\u5ea6\u8106\u5f31\uff0c\u534a\u5c0e\u9ad4\u7522\u696d\u5728\u9081\u5411 High-NA EUV \u7684\u540c\u6642\uff0c\u52a0\u901f\u5c07\u6676\u7247\u67b6\u69cb\u8f49\u5411\u300c\u6a21\u7d44\u5316\u5c0f\u6676\u7247\uff08Chiplet\uff09\u300d\u3002<\/p>\n<p>\u8a2d\u8a08\u8005\u4e0d\u518d\u5f37\u6c42\u88fd\u9020\u8d85\u904e 700 mm\u00b2 \u7684\u55ae\u4e00\u5de8\u77f3\u6676\u7247\uff0c\u800c\u662f\u5c07\u904b\u7b97\u6838\u5fc3\uff08Compute Die\uff09\u3001\u5feb\u53d6\u8a18\u61b6\u9ad4\u6a21\u7d44\u8207 I\/O \u63a7\u5236\u4ecb\u9762\u62c6\u89e3\u6210\u6578\u9846\u5c0f\u65bc 400 mm\u00b2 \u7684\u7368\u7acb Chiplet\uff0c\u904b\u7b97\u6838\u5fc3\u63a1\u7528 High-NA EUV \u88fd\u7a0b\u88fd\u9020\uff0c\u5176\u4ed6\u975e\u95dc\u9375\u6a21\u7d44\u63a1\u7528\u6210\u719f\u88fd\u7a0b\uff0c\u6700\u5f8c\u5728\u5f8c\u6bb5\u900f\u904e\u9ad8\u5bc6\u5ea6\u5148\u9032\u5c01\u88dd\u57fa\u677f\u4e92\u9023\u3002\u7576\u6676\u7247\u5c3a\u5bf8\u5728\u5f8c\u6bb5\u6301\u7e8c\u64f4\u5927\u6642\uff0c\u7522\u80fd\u8207\u57fa\u677f\u9762\u7a4d\u6548\u76ca\u4e5f\u6210\u70ba\u65b0\u6230\u5834\uff0c\u76f8\u95dc\u5c01\u88dd\u88fd\u7a0b\u5c0d\u6bd4\u53ef\u53c3\u95b1<a href=\"https:\/\/www.taichungbro.com\/en\/2026\/09\/15\/foplp-vs-cowos-packaging\/\" style=\"color: #00c8d7; text-decoration: underline;\">Can panel-level fan-out packaging (FOPLP) solve the CoWoS production shortage? Analyzing the area benefits and warpage challenges of square substrates.<\/a>.<\/p>\n<h2 id=\"advanced-nodes-cost-physics-balance\" style=\"scroll-margin-top: 110px;\">\u5148\u9032\u88fd\u7a0b\u5728\u7269\u7406\u6975\u9650\u8207\u91cf\u7522\u6210\u672c\u4e4b\u9593\u7684\u5e73\u8861\u9ede<\/h2>\n<p>\u5728\u534a\u5c0e\u9ad4\u88fd\u9020\u7684\u6b77\u53f2\u4e0a\uff0c\u52dd\u8ca0\u5f9e\u4f86\u4e0d\u662f\u7531\u300c\u8ab0\u6700\u5148\u63a1\u7528\u6700\u9ad8\u898f\u683c\u7684\u7269\u7406\u8a2d\u5099\u300d\u6c7a\u5b9a\uff0c\u800c\u662f\u7531\u300c\u8ab0\u80fd\u5728\u53ef\u63a7\u7684\u826f\u7387\u4e0b\u63d0\u4f9b\u6700\u4f4e\u7684\u6bcf\u55ae\u4f4d\u904b\u7b97\u6210\u672c\u300d\u6c7a\u5b9a\u3002High-NA EUV \u7684\u5c0e\u5165\u7bc0\u594f\uff0c\u9bae\u660e\u53cd\u6620\u4e86\u6676\u5713\u4ee3\u5de5\u96d9\u96c4\u4e0d\u540c\u7684\u5546\u696d\u54f2\u5b78\u3002<\/p>\n<h3>\u5169\u5927\u5de8\u982d\u7684 High-NA \u6230\u7565\u5206\u6b67<\/h3>\n<ol>\n<li><strong>\u82f1\u7279\u723e\uff08Intel\uff09\u7684\u6280\u8853\u9032\u653b\u7b56\u7565<\/strong>\uff1a<\/li>\n<\/ol>\n<p>\u82f1\u7279\u723e\u5728 2024 \u5e74\u7387\u5148\u751f\u7522\u4e26\u7d44\u88dd\u4e86\u5168\u7403\u7b2c\u4e00\u53f0\u5546\u696d\u7814\u767c\u7d1a ASML TWINSCAN EXE:5000\uff0c\u4e26\u7a4d\u6975\u4e0b\u8a02\u91cf\u7522\u578b EXE:5200\u3002\u82f1\u7279\u723e\u7684\u6230\u7565\u610f\u5716\u975e\u5e38\u660e\u78ba\uff1a\u5e0c\u671b\u85c9\u7531 High-NA \u7684 8 nm \u55ae\u6b21\u66dd\u5149\u80fd\u529b\uff0c\u5728 Intel 18A \/ Intel 14A \u7bc0\u9ede\u907f\u958b\u7e41\u7463\u4e14\u5bb9\u6613\u5931\u8aa4\u7684\u591a\u91cd\u66dd\u5149\u6d41\u7a0b\uff0c\u85c9\u7531\u7269\u7406\u5149\u5b78\u7684\u5148\u767c\u512a\u52e2\u722d\u53d6\u96fb\u6676\u9ad4\u5bc6\u5ea6\u8207\u88fd\u9020\u9031\u671f\uff08Cycle Time\uff09\u7684\u9818\u5148\u5730\u4f4d\u3002<\/p>\n<ol>\n<li><strong>\u53f0\u7a4d\u96fb\uff08TSMC\uff09\u7684\u7cbe\u5bc6\u6210\u672c\u6548\u76ca\u4e3b\u7fa9<\/strong>\uff1a<\/li>\n<\/ol>\n<p>\u53f0\u7a4d\u96fb\u5c0d\u65bc High-NA EUV \u5247\u63a1\u53d6\u6975\u70ba\u5be9\u614e\u7684\u8a55\u4f30\u614b\u5ea6\u3002\u5728 2nm\uff08N2 \u7cfb\u5217\uff09\u4ee5\u53ca\u5c0e\u5165\u8d85\u7d1a\u96fb\u8ecc\uff08Super Power Rail\uff0c\u80cc\u9762\u4f9b\u96fb\uff09\u7684 A16 \u7bc0\u9ede\u4e2d\uff0c\u53f0\u7a4d\u96fb\u78ba\u8a8d\u7e7c\u7e8c\u4ee5\u6210\u719f\u7684 0.33 NA EUV \u642d\u914d\u81ea\u5c0d\u6e96\u591a\u91cd\u66dd\u5149\uff08Low-NA Multi-Patterning\uff09\u8207\u512a\u5316\u5149\u963b\u6280\u8853\u63a8\u9032\u3002\u53f0\u7a4d\u96fb\u8a55\u4f30\uff0c\u73fe\u6709\u6a5f\u53f0\u5df2\u5b8c\u6210\u5de8\u984d\u6298\u820a\uff0c\u4e14\u7121\u9700\u627f\u64d4\u8b8a\u5f62\u5149\u5b78\u534a\u66dd\u5149\u5834\u5e36\u4f86\u7684\u5149\u7f69\u5957\u6578\u500d\u589e\u8207\u62fc\u63a5\u826f\u7387\u98a8\u96aa\u3002\u53f0\u7a4d\u96fb\u9810\u8a08\u5c07 High-NA EUV \u7684\u5927\u898f\u6a21\u5546\u696d\u5c0e\u5165\u6642\u9593\u9ede\u4fdd\u7559\u7d66\u5f8c\u7e8c\u7684 A14 \u6216 2028 \u5e74\u5f8c\u4e16\u4ee3\uff0c\u5f85\u5468\u908a\u751f\u614b\u7cfb\u5b8c\u5168\u6210\u719f\u3002<\/p>\n<h3>\u6c7a\u5b9a High-NA \u5c0e\u5165\u81e8\u754c\u9ede\u7684\u95dc\u9375\u56e0\u5b50<\/h3>\n<p>\u6676\u5713\u5ee0\u7a76\u7adf\u4f55\u6642\u300c\u5fc5\u9808\u300d\u63a1\u7528 High-NA EUV\uff1f\u6c7a\u7b56\u7684\u6838\u5fc3\u516c\u5f0f\u5728\u65bc\u300c\u591a\u91cd\u66dd\u5149\u7d2f\u8a08\u7f3a\u9677\u6210\u672c\u300d\u8207\u300cHigh-NA \u6a5f\u53f0\u6298\u820a\u8207\u751f\u614b\u6210\u672c\u300d\u4e4b\u9593\u7684\u4ea4\u6703\u9ede\uff1a<\/p>\n<ul>\n<li><strong>\u8a2d\u5099\u8cc7\u672c\u652f\u51fa\u8207\u6298\u820a<\/strong>\uff1a\u4e00\u53f0\u6a19\u6e96 0.33 NA EUV\uff08\u5982 NXE:3800E\uff09\u552e\u50f9\u7d04\u70ba 1.8 \u5104\u81f3 2 \u5104\u7f8e\u5143\uff1b\u800c\u4e00\u53f0 0.55 High-NA EUV\uff08\u5982 EXE:5200\uff09\u552e\u50f9\u903c\u8fd1 3.8 \u5104\u81f3 4 \u5104\u6b50\u5143\uff08\u8d85\u904e 4 \u5104\u7f8e\u5143\uff09\uff0c\u50f9\u683c\u7ffb\u500d\u3002<\/li>\n<li><strong>\u66dd\u5149\u6b21\u6578\u8207\u5149\u7f69\u6210\u672c<\/strong>\uff1a\u82e5\u4f7f\u7528 0.33 NA \u9032\u884c\u95dc\u9375\u91d1\u5c6c\u5c64\u66dd\u5149\uff0c\u7576\u9593\u8ddd\u7e2e\u5c0f\u81f3\u5fc5\u9808\u63a1\u7528\u4e09\u6b21\u751a\u81f3\u56db\u6b21\u591a\u91cd\u66dd\u5149\uff08SAQP \u6216 LELELE\uff09\u6642\uff0c\u5149\u7f69\u5957\u6578\u500d\u589e\u3001\u6676\u5713\u5728\u6a5f\u53f0\u5167\u53cd\u8986\u6e05\u6d17\u3001\u6c89\u7a4d\u3001\u5fae\u5f71\u8207\u8755\u523b\u7684\u6b21\u6578\u6025\u907d\u589e\u52a0\uff0c\u7522\u7dda\u751f\u7522\u9031\u671f\u5927\u5e45\u62c9\u9577\uff0c\u6bcf\u9053\u6b65\u9a5f\u758a\u52a0\u7684\u96a8\u6a5f\u7f3a\u9677\u7387\u5c07\u8836\u98df\u826f\u7387\u3002<\/li>\n<li><strong>\u5468\u908a\u751f\u614b\u7cfb\u7684\u6210\u719f\u5ea6<\/strong>\uff1aHigh-NA \u4e26\u975e\u55ae\u6253\u7368\u9b25\uff0c\u5b83\u9ad8\u5ea6\u4f9d\u8cf4\u8d85\u8584\u91d1\u5c6c\u6c27\u5316\u7269\u5149\u963b\uff08MOx PR\uff09\u3001\u80fd\u627f\u53d7\u9ad8\u529f\u7387\u96fb\u5b50\u8f5f\u64ca\u7684\u65b0\u578b\u78b3\u5948\u7c73\u7ba1\u5149\u7f69\u8b77\u819c\uff08Pellicle\uff09\u3001\u4ee5\u53ca\u5c08\u9580\u9069\u61c9\u534a\u66dd\u5149\u5834\u7684 EDA \u5149\u7f69\u62fc\u63a5\u9a57\u8b49\u8edf\u9ad4\u3002<\/li>\n<\/ul>\n<p>\u7576 0.33 NA \u591a\u91cd\u66dd\u5149\u5e36\u4f86\u7684\u7d2f\u8a08\u826f\u7387\u640d\u5931\u8207\u5de5\u6642\u6210\u672c\uff0c\u6b63\u5f0f\u8d85\u8d8a High-NA \u6a5f\u53f0\u6298\u820a\u8207\u534a\u8996\u5834\u5149\u7f69\u6210\u672c\u4e4b\u6642\uff0cHigh-NA EUV \u624d\u6703\u5f9e\u300c\u5c11\u6578\u7814\u767c\u7dda\u7684\u6280\u8853\u5c55\u793a\u300d\u771f\u6b63\u8f49\u8b8a\u70ba\u300c\u5927\u898f\u6a21\u5546\u696d\u91cf\u7522\u7684\u6700\u4f73\u89e3\u300d\u3002<\/p>","protected":false},"excerpt":{"rendered":"<p>NA \u6578\u503c\u5b54\u5f91\u6c7a\u5b9a\u5fae\u5f71\u5149\u5b78\u7e5e\u5c04\u6975\u9650\u8207\u6676\u7247\u89e3\u6790\u5ea6\u3002\u672c\u6587\u4f9d\u745e\u5229\u6e96\u5247\u5c0d\u7167 DUV \u5230 0.55 High-NA EUV \u898f\u683c\uff0c\u6df1\u5165\u89e3\u6790 ASML \u8b8a\u5f62\u5149\u5b78\u3001\u7126\u6df1\u92b3\u6e1b\u3001\u534a\u66dd\u5149\u5834\u8207\u5149\u7f69\u62fc\u63a5\u6311\u6230\uff0c\u5256\u6790 2nm \u8207 A16 \u4e16\u4ee3\u7684\u91cf\u7522\u6210\u672c\u53d6\u6368\u3002<\/p>","protected":false},"author":5,"featured_media":3879,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[45],"tags":[664,660,448,672,662,670,667],"class_list":["post-3881","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industrial-knowledge","tag-asml-exe5000","tag-high-na-euv","tag-448","tag-672","tag-662","tag-670","tag-667"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts\/3881","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/comments?post=3881"}],"version-history":[{"count":0,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/posts\/3881\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/media\/3879"}],"wp:attachment":[{"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/media?parent=3881"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/categories?post=3881"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.taichungbro.com\/en\/wp-json\/wp\/v2\/tags?post=3881"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}