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Tag: LSA

晶圓退火瞬熱特寫 Wafer rapid anneal close-up

What exactly does annealing do in semiconductor manufacturing? A complete analysis from activation to stress release.

Annealing is a crucial step in semiconductor manufacturing processes for activating doping and repairing defects. This article provides an in-depth comparison of temperature spikes, thermal budgets, and uniformity in furnace tube, RTA, LSA, and microwave annealing, and explains how...
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